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PROBE CARD AND METHOD OF MANUFACTURING THE SAME

  • US 20150022230A1
  • Filed: 07/10/2014
  • Published: 01/22/2015
  • Est. Priority Date: 07/19/2013
  • Status: Active Grant
First Claim
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1. A probe card, comprising:

  • a wiring substrate including an opening portion;

    a first connection pad formed on a first face of the wiring substrate and arranged in one area of a periphery of the opening portion;

    a second connection pad formed on the first face of the wiring substrate and arranged in another area of a periphery of the opening portion, the another area which is opposed to the first connection pad;

    a resin portion formed in the opening portion of the wiring substrate;

    a first wire buried in the resin portion, the first wire in which one end is connected to the first, connection pad and other end constitutes a first contact terminal protruding from a lower face of the resin portion, the lower face which is located to a reverse face side to a face on which the first and second connection pads are arranged; and

    a second wire buried in the resin portion, the second wire in which one end is connected to the second connection pad and other end constitutes a second contact terminal protruding from the lower face of the resin portion, whereinthe first wire and the second wire extend on one line in a plan view, and the first contact terminal and the second contact terminal are arranged side by side on the one line, andthe first contact terminal and the second contact terminal are gathered to be separated each other such that the first and second contact terminals touch one electrode pad of a test object with a pair.

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