SURFACE MEASUREMENT APPARATUS AND METHOD
First Claim
1. A metrological apparatus for measuring a surface characteristic of a workpiece, the apparatus comprising:
- a workpiece support surface defining a frame of reference having a first axis, x, extending parallel to the workpiece support surface and a second axis, z, normal to the workpiece support surface;
a mover to carry out a measurement by effecting relative movement in a measurement direction, X, between the workpiece support surface and a stylus such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a surface of a workpiece supported on the workpiece support surface;
a transducer to provide a measurement data set in a measurement coordinate system representing the deflection, a, of the stylus at measurement points in the measurement direction, X, along the measurement path;
a rotation device to effect relative rotation of the workpiece support surface and the mover about a rotation axis; and
a data processor configured to;
to receive a first measurement data set representing a measurement along a measurement path on a calibration component surface which is not symmetric about the rotation axis;
to receive a second measurement data set representing a measurement along a measurement path on the calibration component surface after rotation of 180 degrees about the rotation axis;
to determine a location of intersection of the first and second measurement data sets; and
to determine the frame of reference of the apparatus on the basis of the determined intersection.
1 Assignment
0 Petitions
Accused Products
Abstract
A metrological apparatus has a workpiece support surface (16) and a mover (9) to carry out a measurement by effecting relative movement in a measurement direction, X, between the workpiece support surface and a stylus (11) such that the stylus is deflected as a stylus tip of the stylus follows surface variations. A transducer (39) provides a measurement data set in a measurement coordinate system representing the deflection, a, of the stylus at measurement points in the measurement direction, X. A rotation device (16) effects relative rotation of the workpiece support surface and the mover about a rotation axis. A data processor is provided to determine a location of intersection of a first measurement data set representing a measurement along a measurement path on a calibration component surface which is not symmetric about the rotation axis and a second measurement data set representing a measurement along a measurement path on the calibration component surface after rotation of 180 degrees about the rotation axis and to determine the frame of reference of the apparatus using the determined intersection.
3 Citations
36 Claims
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1. A metrological apparatus for measuring a surface characteristic of a workpiece, the apparatus comprising:
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a workpiece support surface defining a frame of reference having a first axis, x, extending parallel to the workpiece support surface and a second axis, z, normal to the workpiece support surface; a mover to carry out a measurement by effecting relative movement in a measurement direction, X, between the workpiece support surface and a stylus such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a surface of a workpiece supported on the workpiece support surface; a transducer to provide a measurement data set in a measurement coordinate system representing the deflection, a, of the stylus at measurement points in the measurement direction, X, along the measurement path; a rotation device to effect relative rotation of the workpiece support surface and the mover about a rotation axis; and a data processor configured to; to receive a first measurement data set representing a measurement along a measurement path on a calibration component surface which is not symmetric about the rotation axis; to receive a second measurement data set representing a measurement along a measurement path on the calibration component surface after rotation of 180 degrees about the rotation axis; to determine a location of intersection of the first and second measurement data sets; and to determine the frame of reference of the apparatus on the basis of the determined intersection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 36)
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13. A method for facilitating measurement of a surface characteristic of a workpiece using an apparatus comprising:
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a workpiece support surface defining a frame of reference having a first axis, x, extending parallel to the workpiece support surface and a second axis, z, normal to the workpiece support surface; a mover to carry out a measurement by effecting relative movement in a measurement direction, X, between the workpiece support surface and a stylus such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a surface of a workpiece supported on the workpiece support surface; a transducer to provide a measurement data set in a measurement coordinate system representing the deflection, a, of the stylus at measurement points in the measurement direction, X, along the measurement path; and a rotation device to effect relative rotation of the workpiece support surface and the mover about a rotation axis, the method comprising; determining a location of intersection of a first measurement data set representing a measurement along a measurement path on a calibration component surface which is not symmetric about the rotation axis and a second measurement data set representing a measurement along a measurement path on the calibration component surface after rotation of 180 degrees about the rotation axis; and determining the frame of reference of the apparatus using the determined intersection. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A data processor for a metrological apparatus for measuring a surface characteristic of a workpiece, the apparatus comprising:
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a workpiece support surface defining a frame of reference having a first axis, x, extending parallel to the workpiece support surface and a second axis, z, normal to the workpiece support surface; a mover to carry out a measurement by effecting relative movement in a measurement direction, X, between the workpiece support surface and a stylus such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a surface of a workpiece supported on the workpiece support surface; a transducer to provide a measurement data set in a measurement coordinate system representing the deflection, a, of the stylus at measurement points in the measurement direction, X, along the measurement path; and a rotation device to effect relative rotation of the workpiece support surface and the mover about a rotation axis, the data processor being configured to; to receive a first measurement data set representing a measurement along a measurement path on a calibration component surface which is not symmetric about the rotation axis; to receive a second measurement data set representing a measurement along a measurement path on the calibration component surface after rotation of 180 degrees about the rotation axis; to determine a location of intersection of the first and second measurement data sets; and to determine the frame of reference of the apparatus on the basis of the determined intersection. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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33. A metrological apparatus substantially as hereinbefore described with reference to and/or as illustrated in the accompanying drawings.
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34. A data processor substantially as hereinbefore described with reference to and/or as illustrated in the accompanying drawings.
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35. A method substantially as hereinbefore described with reference to and/or as illustrated in
FIG. 4 of the accompanying drawings.
Specification