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ANODE FOR ELECTROPLATING AND METHOD FOR ELECTROPLATING USING ANODE

  • US 20150027899A1
  • Filed: 08/31/2012
  • Published: 01/29/2015
  • Est. Priority Date: 09/13/2011
  • Status: Active Grant
First Claim
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1. An anode for electroplating used in electroplating which uses an aqueous solution as an electrolytic solution, wherein a catalytic layer containing amorphous ruthenium oxide and amorphous tantalum oxide is formed on a conductive substrate.

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