Microfabricated magnetic field transducer with flux guide

• US 20150028863A1
• Filed: 07/29/2013
• Published: 01/29/2015
• Est. Priority Date: 07/29/2013
• Status: Active Grant

• Current Assignee: Atomica Corporation (Answers.com Corporation)
• Original Assignee: Innovative Micro Technology Incorporated
• Inventors: Zeyen, Benedikt
• Granted Patent: US 9,274,180 B2
• Time in Patent Office: Days
• US Class Current: 324/244
• CPC Class Codes: G01R 33/0011 comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
• CPC Class Codes: G01R 33/0052 Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips devices based on galvano-magnetic effect or the like H10N50/85
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.

Claims

7-1. The magnetic transducer of claim 1, wherein the at least one flux guide is configured to rotate a component of the external magnetic field into the one axis by providing a low reluctance path for the one component of the external magnetic field through the one axis of the magnetically sensitive structure.

25. A method for making a magnetic transducer, comprising:

forming a magnetically sensitive structure having one axis of maximum sensitivity, disposed on a surface of a substrate; and

forming at least one flux guide having high magnetic permeability and configured to route at least one component of the external magnetic field along the one axis of the magnetically sensitive member.