×

TOOL FOR ANNEALING OF MAGNETIC STACKS

  • US 20150031146A1
  • Filed: 03/19/2012
  • Published: 01/29/2015
  • Est. Priority Date: 03/19/2012
  • Status: Active Grant
First Claim
Patent Images

1. A tool for annealing a magnetic stack, the tool comprising:

  • a housing defining a heating chamber;

    a holding mechanism configured to hold at least one wafer in a single line within the heating chamber;

    a heating mechanism configured to heat the at least one wafer; and

    a magnetic field generator configured to generate a magnetic field whose magnetic field lines pass though the single line of wafers during a magnetic annealing process.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×