DISPLAY PANEL AND MANUFACTURING METHOD THEREOF
First Claim
1. A method of manufacturing a display panel, the method comprising:
- providing a substrate, the substrate comprising a first surface and a second surface opposite to the first surface;
forming a gate electrode extending along a first direction on the first surface;
orderly forming a gate insulator, a semiconductor layer, and an etch stop layer to cover the gate electrode;
forming a photoresist layer to cover the photoresist layer;
patterning the photoresist layer to form a first photoresist pattern from the first surface via a first mask;
patterning the first photoresist pattern to form a second photoresist pattern from the second surface by using the gate electrode as a second mask;
etching the etch stop layer by a dry etch process to form an etch stop pattern smaller than the second photoresist pattern;
removing the second photoresist pattern remaining after the dry etch process and forming the photoresist layer to cover the etch stop pattern and the semiconductor layer;
patterning the photoresist layer from the first surface via the first mask to form the first photoresist pattern on the etch stop pattern;
patterning the first photoresist pattern from the second surface by using the gate electrode as the second mask to form the second photoresist pattern;
etching the semiconductor layer by a wet etch process to form a semiconductor pattern corresponding to the second photoresist pattern;
removing the second photoresist pattern remaining after the wet etch process; and
forming a source electrode and a drain electrode respectively at two symmetric sides of the gate electrode, and both of the source electrode and drain electrode orderly covering the etch stop pattern, the semiconductor pattern, and the gate insulator.
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Accused Products
Abstract
A display panel manufacturing method includes forming a gate electrode on a substrate and a gate insulator, a semiconductor layer, and an etch stop layer covering the gate electrode. A photoresist layer covering on the etch stop layer is pattern from two opposite side of the substrate by two photolithography processes to form a photoresist pattern. The etch stop layer is dry etched to form an etch stop pattern via the photoresist pattern. The photoresist pattern is formed again by two photolithography processes. The semiconductor layer is wet etched to form a semiconductor pattern via the photoresist pattern. A source electrode and a drain electrode is formed corresponding to two opposite sides of the gate electrode to orderly cover the etch pattern, the semiconductor pattern, and the gate insulator.
17 Citations
10 Claims
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1. A method of manufacturing a display panel, the method comprising:
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providing a substrate, the substrate comprising a first surface and a second surface opposite to the first surface; forming a gate electrode extending along a first direction on the first surface; orderly forming a gate insulator, a semiconductor layer, and an etch stop layer to cover the gate electrode; forming a photoresist layer to cover the photoresist layer; patterning the photoresist layer to form a first photoresist pattern from the first surface via a first mask; patterning the first photoresist pattern to form a second photoresist pattern from the second surface by using the gate electrode as a second mask; etching the etch stop layer by a dry etch process to form an etch stop pattern smaller than the second photoresist pattern; removing the second photoresist pattern remaining after the dry etch process and forming the photoresist layer to cover the etch stop pattern and the semiconductor layer; patterning the photoresist layer from the first surface via the first mask to form the first photoresist pattern on the etch stop pattern; patterning the first photoresist pattern from the second surface by using the gate electrode as the second mask to form the second photoresist pattern; etching the semiconductor layer by a wet etch process to form a semiconductor pattern corresponding to the second photoresist pattern; removing the second photoresist pattern remaining after the wet etch process; and forming a source electrode and a drain electrode respectively at two symmetric sides of the gate electrode, and both of the source electrode and drain electrode orderly covering the etch stop pattern, the semiconductor pattern, and the gate insulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification