SENSING MODULE AND ANGULAR VELOCITY SENSOR HAVING THE SAME

• US 20150033852A1
• Filed: 07/29/2014
• Published: 02/05/2015
• Est. Priority Date: 07/31/2013
• Status: Active Grant

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Kim, Jong Woon, Jeung, Won Kyu, Lee, Jung Won, Shin, Seung Joo
• Granted Patent: US 9,625,484 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure

Abstract

An angular velocity sensor comprises a mass body part including a first mass body and a second mass body, an internal frame supporting the first mass body and the second mass body, one or more first flexible parts connecting the first mass body or the second mass body to the internal frame, one or more second flexible parts connecting the first mass body or the second mass body to the internal frame, an external frame supporting the internal frame, at least one third flexible part connecting the internal frame to the external frame, and at least one fourth flexible part connecting the internal frame to the external frame. At least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body. At least one other of the second flexible parts is connected to an eccentric portion of the second mass body.

Claims

1. A sensing module for a sensor, the sensing module comprising:

a mass body part including a first mass body and a second mass body;

a frame supporting the first mass body and the second mass body;

one or more first flexible parts connecting the first mass body and/or the second mass body to the frame; and

one or more second flexible parts connecting the first mass body and/or the second mass body to the frame,

wherein at least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body, and at least one of the second flexible parts is connected to an eccentric portion of the second mass body.

2. The sensing module of claim 1, wherein the first flexible part and the second flexible part are perpendicular to each other.

3. The sensing module of claim 1, wherein the first flexible part is a beam that has a predetermined thickness in the z-axis direction and has a plane defined by the x-axis and y-axis, and

wherein a width of the first flexible part in the x-axis direction is larger than the thickness of the first flexible part in the z-axis direction.

4. The sensing module of claim 1, wherein the second flexible part is a hinge that has a predetermined thickness in the y-axis direction and has a plane defined by the x-axis and z-axis, and

wherein a width of the second flexible part in the z-axis direction is larger than the thickness of the second flexible part in the y-axis direction.

5. An angular velocity sensor comprising:

a mass body part including a first mass body and a second mass body;

an internal frame supporting the first mass body and the second mass body;

one or more first flexible parts connecting the first mass body and/or the second mass body to the internal frame;

one or more second flexible parts connecting the first mass body and/or the second mass body to the internal frame;

an external frame supporting the internal frame;

at least one third flexible part connecting the internal frame to the external frame; and

at least one fourth flexible part connecting the internal frame to the external frame,

wherein at least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body, and at least one of the second flexible parts is connected to an eccentric portion of the second mass body.

6. The angular velocity sensor of claim 5, wherein the fourth flexible part is disposed in line with the center of gravity of the second mass body.

7. The angular velocity sensor of claim 5, wherein the first flexible part and the second flexible part are perpendicular to each other.

8. The angular velocity sensor of claim 5, wherein the third flexible part and the fourth flexible part are perpendicular to each other.

9. The angular velocity sensor of claim 5, wherein the third flexible part and the first flexible part are perpendicular to each other.

10. The angular velocity sensor of claim 5, wherein the fourth flexible part and the second flexible part are perpendicular to each other.

11. The angular velocity sensor of claim 5, wherein the first flexible part is a beam that has a predetermined thickness in the z-axis direction and has a plane defined by the x-axis and y-axis, and

wherein a width of the first flexible part in the x-axis direction is larger than the thickness of the first flexible part in the z-axis direction.

12. The angular velocity sensor of claim 11, wherein the first flexible parts connect both ends of the first mass body in the y-axis direction to the internal frame.

13. The angular velocity sensor of claim 11, wherein the first flexible part connects one end of the second mass body in the y-axis direction to the internal frame.

14. The angular velocity sensor of claim 5, wherein the second flexible part is a hinge that has a predetermined thickness in the y-axis direction and has a plane defined by the x-axis and z-axis, and

wherein a width of the second flexible part in the z-axis direction is larger than the thickness of the second flexible part in the y-axis direction.

15. The angular velocity sensor of claim 14, wherein the second flexible part is connected to a center mass body so as to be in line with the center of gravity of the first mass body in the y-axis.

16. The angular velocity sensor of claim 14, wherein the second flexible part is connected to a portion of the second mass body which is spaced apart from the center of gravity of the second mass body in the y-axis.

17. The angular velocity sensor of claim 5, wherein the third flexible part is a beam that has a predetermined thickness in the z-axis direction and has a plane defined by the x-axis and y-axis, and

wherein a width of the third flexible part in the y-axis direction is larger than the thickness of the third flexible part in the z-axis direction.

18. The angular velocity sensor of claim 5, wherein the fourth flexible part is a hinge that has a predetermined thickness in the x-axis direction and has a plane defined by the y-axis and z-axis, and

wherein a width of the fourth flexible part in the z-axis direction is larger than the thickness of the fourth flexible part in the x-axis direction.

19. The angular velocity sensor of claim 5, wherein the third flexible part has driving unit to drive the internal frame, the internal frame is rotatable about the axis to which the fourth flexible part is connected with respect to the external frame, if the internal frame is driven by the driving unit of the third flexible part.

20. The angular velocity sensor of claim 19, wherein the third flexible part generates bending stress and the fourth flexible part generates torsion stress, if the internal frame is rotated on the axis to which the fourth flexible part is connected.

21. The angular velocity sensor of claim 20, wherein the first and second mass bodies are rotatable about the axis to which the second flexible part is connected with respect to the internal frame, if the internal frame is rotated on the axis to which the fourth flexible part is connected.

22. The angular velocity sensor of claim 21, wherein the first flexible part generates bending stress and the second flexible part generates torsion stress, if the first and second mass bodies are rotated.

23. The angular velocity sensor of claim 5, wherein the first mass body includes:

a first one-side mass body located beside one side of the second mass body; and

a first other-side mass body located beside another side of the second mass body.

24. The angular velocity sensor of claim 23, wherein the first mass body has the first flexible parts connected to both ends in the y-axis direction, and the second mass body has the first flexible part connected to one end in the y-axis direction.

25. The angular velocity sensor of claim 24, wherein the first mass body and the second mass body have the second flexible parts connected to both sides in the x-axis direction.

26. The angular velocity sensor of claim 23, wherein the fourth flexible part is connected to the center of the internal frame such that the first one-side mass body and the first other-side mass body are arranged symmetrically.

27. An angular velocity sensor comprising:

a mass body part including a first mass body and a second mass body;

an internal frame supporting the first mass body and the second mass body;

one or more first flexible parts connecting the first mass body and/or the second mass body to the internal frame;

one or more second flexible parts connecting the first mass body and/or the second mass body to the internal frame;

an external frame supporting the internal frame;

at least one third flexible part connecting the internal frame to the external frame; and

at least one fourth flexible part connecting the internal frame to the external frame,

wherein the second mass body includes a second one-side mass body and a second other-side mass body inserted into the internal frame such that the second one-side mass body and the second other-side mass body are arranged symmetrically, and

wherein at least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body, and at least one of the second flexible parts is connected to an eccentric portion of the second one-side mass body and the second other-side mass body.

28. An angular velocity sensor comprising:

a mass body part including a first mass body and a second mass body;

an internal frame supporting the first mass body and the second mass body;

one or more first flexible parts connecting the first mass body and/or the second mass body to the internal frame;

one or more second flexible parts connecting the first mass body and/or the second mass body to the internal frame;

an external frame supporting the internal frame;

at least one third flexible part connecting the internal frame to the external frame; and

at least one fourth flexible part connecting the internal frame to the external frame,

wherein;

at least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body,

at least one of the second flexible parts is connected to an eccentric portion of the second mass body, and

the second flexible parts connecting the first mass body to the internal frame are arranged on the same extended line, and the second flexible parts connecting the second mass body to the internal frame are arranged on the same extended line.

29. An angular velocity sensor comprising:

a mass body part including a first mass body and a second mass body with a hollow part;

an internal frame supporting the first mass body and the second mass body;

one or more first flexible parts connecting the first mass body and/or the second mass body to the internal frame;

one or more second flexible parts connecting the first mass body and/or the second mass body to the internal frame;

an external frame supporting the internal frame;

at least one third flexible part connecting the internal frame to the external frame; and

at least one fourth flexible part connecting the internal frame to the external frame,

wherein at least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body, and at least one of the second flexible parts is connected to an eccentric portion of the second mass body.