ACCELERATION SENSOR AND ANGULAR VELOCITY SENSOR
First Claim
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1. An acceleration sensor, comprising:
- a mass body part including a first mass body and a second mass body;
a frame supporting the first mass body and the second mass body;
first flexible parts each connecting the first mass body and the second mass body to the frame; and
second flexible parts each connecting the first mass body and the second mass body to the frame,wherein the second flexible parts are connected to the first mass body and the second mass body so as to be spaced apart from the centers of gravity of the first mass body and the second mass body.
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Abstract
Disclosed herein is an acceleration sensor, including: a mass body part including a first mass body and a second mass body; a frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the frame; and second flexible parts each connecting the first mass body and the second mass body to the frame, wherein the first mass body and the second mass body are each connected to the frame so as to be eccentric by the second flexible part.
39 Citations
42 Claims
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1. An acceleration sensor, comprising:
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a mass body part including a first mass body and a second mass body; a frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the frame; and second flexible parts each connecting the first mass body and the second mass body to the frame, wherein the second flexible parts are connected to the first mass body and the second mass body so as to be spaced apart from the centers of gravity of the first mass body and the second mass body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An angular velocity sensor, comprising:
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a mass body part including a first mass body and a second mass body; an internal frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the internal frame; second flexible parts each connecting the first mass body and the second mass body to the internal frame, an external frame supporting the internal frame; a third flexible part connecting the internal frame and the external frame to each other; and a fourth flexible part connecting the internal frame and the external frame to each other, wherein the second flexible parts are connected to the first mass body and the second mass body so as to be spaced apart from the centers of gravity of the first mass body and the second mass body. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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Specification