CHARGED PARTICLE BEAM APPARATUS
First Claim
1. A charged particle beam apparatus comprising:
- a distribution detecting unit configured to measure a distribution of an amount of an electric current with respect to an emitting direction of a charged particle beam emitted from a charged particle beam emitter;
a fluctuation predicting unit configured to predict a fluctuation of an electric current applied to a sample from a distribution of an electric current of the charged particle beam measured by the distribution detecting unit;
a position determining unit configured to determine a position of the electric current applied to the sample based on a predicted result of the fluctuation predicting unit; and
a position control unit configured to control a position at which the charged particle beam applied to the sample is acquired based on a determination made by the position determining unit.
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Accused Products
Abstract
An embodiment is to provide a technique that continuously applies a certain amount of an electron beam to a sample by selecting a beam applied to the sample from an electron beam emitted from an electron source in a scanning electron microscope. A charged particle apparatus is configured, including: a mechanism that detects the distribution of electric current strength with respect to the emitting direction of an electron beam emitted from an electron source; a functionality that predicts a fluctuation of an electric current applied to a sample by predicting the distribution of the electric current based on the detected result; a functionality that determines a position at which a beam applied to the sample is acquired based on the predicted result; and a mechanism that controls a position at which a probe beam is acquired based on the determined result.
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Citations
15 Claims
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1. A charged particle beam apparatus comprising:
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a distribution detecting unit configured to measure a distribution of an amount of an electric current with respect to an emitting direction of a charged particle beam emitted from a charged particle beam emitter; a fluctuation predicting unit configured to predict a fluctuation of an electric current applied to a sample from a distribution of an electric current of the charged particle beam measured by the distribution detecting unit; a position determining unit configured to determine a position of the electric current applied to the sample based on a predicted result of the fluctuation predicting unit; and a position control unit configured to control a position at which the charged particle beam applied to the sample is acquired based on a determination made by the position determining unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification