MATERIALS, STRUCTURES, AND METHODS FOR OPTICAL AND ELECTRICAL III-NITRIDE SEMICONDUCTOR DEVICES
First Claim
1. An optical-electrical device having a first layered structure, wherein the first layered structure has a reflectivity at a wavelength of light used in the device, the first layered structure comprising:
- a substrate having a top surface and a bottom surface; and
a plurality of periods of a metallo-semiconductor on the top surface of the substrate,wherein each of the plurality of periods includes a first layer and a second layer, wherein the first layer is a metal material having a thickness and characterized by an optical penetration depth, and the second layer is a semiconductor having a thickness d1, andwherein the first layer is substantially lattice matched to the second layer.
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Abstract
The present invention provides materials, structures, and methods for III-nitride-based devices, including epitaxial and non-epitaxial structures useful for III-nitride devices including light emitting devices, laser diodes, transistors, detectors, sensors, and the like. In some embodiments, the present invention provides metallo-semiconductor and/or metallo-dielectric devices, structures, materials and methods of forming metallo-semiconductor and/or metallo-dielectric material structures for use in semiconductor devices, and more particularly for use in III-nitride based semiconductor devices. In some embodiments, the present invention includes materials, structures, and methods for improving the crystal quality of epitaxial materials grown on non-native substrates. In some embodiments, the present invention provides materials, structures, devices, and methods for acoustic wave devices and technology, including epitaxial and non-epitaxial piezoelectric materials and structures useful for acoustic wave devices. In some embodiments, the present invention provides metal-base transistor devices, structures, materials and methods of forming metal-base transistor material structures for use in semiconductor devices.
52 Citations
17 Claims
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1. An optical-electrical device having a first layered structure, wherein the first layered structure has a reflectivity at a wavelength of light used in the device, the first layered structure comprising:
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a substrate having a top surface and a bottom surface; and a plurality of periods of a metallo-semiconductor on the top surface of the substrate, wherein each of the plurality of periods includes a first layer and a second layer, wherein the first layer is a metal material having a thickness and characterized by an optical penetration depth, and the second layer is a semiconductor having a thickness d1, and wherein the first layer is substantially lattice matched to the second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for making an optical-electrical device having a first layered structure, wherein the structure has a reflectivity at a wavelength of light used in the device, the structure comprising:
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providing a substrate having a top surface and a bottom surface; and forming a plurality of metallo-semiconductor periods on the top surface of the substrate, wherein each of the plurality of periods includes a first layer and a second layer, wherein the first layer is a metal material having a thickness and characterized by an optical penetration depth, and the second layer is a semiconductor having a thickness d1, wherein d1=m*λ
/n2−
PD, where m is an integer, n is an index of refraction of the semiconductor, λ
is the wavelength of the light in the semiconductor, and PD is the optical penetration depth of the light into the metal material if the thickness of the first layer is greater than the optical penetration depth and otherwise PD is an optical length of the thickness of the first layer, andwherein the first layer is substantially lattice matched to the second layer. III-nitride - View Dependent Claims (12, 13, 14)
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15. An optical-electrical device having a first layered structure, wherein the first layered structure has a reflectivity at a wavelength of light used in the device, the structure comprising:
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a substrate having a top surface and a bottom surface; and a plurality of metallo-dielectric periods on the top surface of the substrate, wherein each of the plurality of periods includes a first layer and a second layer, wherein the first layer is a metal material having a thickness and characterized by an optical penetration depth, and the second layer is a dielectric having a thickness d, and wherein the first layer is substantially lattice matched to the second layer. - View Dependent Claims (16, 17)
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Specification