MICROMIRROR

• US 20150036203A1
• Filed: 10/23/2012
• Published: 02/05/2015
• Est. Priority Date: 12/22/2011
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Nitsche, Heiko, Njikam Njimonzie, Frederic, Muchow, Joerg, Grutzeck, Helmut, Lestyan, Zoltan, Schock, Wolfram
• Granted Patent: US 10,048,487 B2
• Time in Patent Office: Days
• US Class Current: 359/202.1
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0043 Increasing angular deflection
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors

Abstract

A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.

Claims

1-13. -13. (canceled)

14. A micromirror, comprising:

a first layer having a first main extension plane;

a second layer having a second main extension plane;

the first main extension plane and the second main extension plane being situated parallel to one another;

the first layer and the second layer being sectionally connected to one another via at least one connection area;

at least one spring element being implemented in the first layer;

a movably suspended mirror plate being implemented in the second layer;

the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element; and

a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate.

15. The micromirror as recited in claim 14, wherein the connection area is formed from an intermediate layer between the first layer and the second layer.

16. The micromirror as recited in claim 14, wherein the connection area is formed from a structured partial area of at least one of the first layer and the second layer.

17. The micromirror as recited in claim 14, wherein the anchor is situated under a surface center of gravity of the mirror plate.

18. The micromirror as recited in claim 14, wherein the spring element has a first extension perpendicular to the first main extension plane and a second extension parallel to the first main extension plane, the first extension being greater by the factor of 2, than the second extension.

19. The micromirror as recited in claim 14, wherein the spring element has a first extension perpendicular to the first main extension plane and a second extension parallel to the first main extension plane, the first extension being greater by the factor of 10, than the second extension.

20. The micromirror as recited in claim 16, wherein a predominant part of the spring element on the second side of the mirror plate is movably situated in relation to the mirror plate.

21. The micromirror as recited in claim 20, wherein the mirror plate is movable around a rotational axis and the spring element has at least one web which is situated parallel to the rotational axis.

22. The micromirror as recited in claim 21, wherein the spring element has at least three webs which are situated parallel to the rotational axis.

23. The micromirror as recited in claim 14, wherein the micromirror has at least two spring elements which are connected to a shared anchor.

24. The micromirror as recited in claim 14, wherein the micromirror has at least two spring elements which are each connected to a separate anchor.

25. The micromirror as recited in claim 14, wherein a first frame is implemented in the first layer and the spring element is connected to the first frame.

27. A two-mirror system, comprising:

a first micromirror, and at least having one second micromirror, each of the micromirrors including a first layer having a first main extension plane, a second layer having a second main extension plane,the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, and a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate;

wherein the two mirror system represents a 2D scanner, the first mirror having a first rotational axis x and the second micromirror having a second rotational axis y which is perpendicular to the first rotational axis of the first mirror, the second micromirror being situated opposite the first mirror, in such a way that a laser beam which irradiates both mirrors is deflectable in two directions.