SEMICONDUCTOR MODULE HAVING AN INTEGRATED WAVEGUIDE FOR RADAR SIGNALS
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Abstract
A semiconductor module, having an integrated circuit, a rewiring layer for externally connecting the integrated circuit, and at least one waveguide integrated into the semiconductor module for radar signals having a conductive pattern, which laterally surrounds the interior of the waveguides, the integrated circuit and the at least one waveguide being embedded, at least in regions, in a housing material of the semiconductor module; as well as a radar sensor, a motor vehicle radar system having such a semiconductor module, and a method for producing a semiconductor module.
23 Citations
27 Claims
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1-13. -13. (canceled)
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14. A semiconductor module, comprising:
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an integrated circuit; a rewiring layer for the external connection of the integrated circuit; and at least one waveguide integrated in a semiconductor module for radar signals having a conductive pattern which laterally surrounds an interior of the waveguide; wherein the integrated circuit and the at least one waveguide are embedded, at least in regions, in a housing material of the semiconductor module. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A radar sensor, comprising:
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a semiconductor module including a wafer unit and an interface layer; wherein the wafer unit includes a semiconductor chip which forms the integrated circuit, and a housing layer, which is formed by the housing material of the semiconductor module and in which the semiconductor chip and the at least one waveguide are situated, and wherein the interface layer includes the rewiring layer, which connects the integrated circuit to external terminals of the interface layer.
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25. A motor vehicle radar system, comprising:
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a semiconductor module including a wafer unit and an interface layer; wherein the wafer unit includes a semiconductor chip which forms the integrated circuit, and a housing layer, which is formed by the housing material of the semiconductor module and in which the semiconductor chip and the at least one waveguide are situated, and wherein the interface layer includes the rewiring layer, which connects the integrated circuit to external terminals of the interface layer.
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26. A method for producing a semiconductor module having at least one integrated waveguide for radar signals, the method comprising:
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providing a semiconductor chip in the form of an integrated circuit; and producing a housing layer of a housing of the semiconductor module that borders at least laterally on the semiconductor chip, at least one waveguide being integrated into the housing layer which has a conductive pattern which laterally surrounds an interior of the waveguide; and producing a rewiring layer on at least one side of the housing layer. - View Dependent Claims (27)
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Specification