HIGH FREQUENCY PROBING STRUCTURE
First Claim
1. A probe card for wafer level test, comprising:
- a space transformer having a power line, a ground line, and signal lines embedded therein, wherein the space transformer includes a first surface having a first pitch and a second surface having a second pitch substantially less than the first pitch;
a printed circuit board configured approximate the first surface of the space transformer;
a first power plane disposed on the first surface of the space transformer and patterned to couple the power line and the ground line to the printed circuit board; and
a second power plane disposed on a surface of the printed circuit board and patterned to couple the power line and the ground line of the space transformer to the printed circuit board, wherein the second power plane is in electrical connection with the first power plane.
1 Assignment
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Accused Products
Abstract
A probe card for wafer level test includes a space transformer having a power line, a ground line, and signal lines embedded therein, wherein the space transformer includes a first surface having a first pitch and a second surface having a second pitch substantially less than the first pitch, a printed circuit board configured approximate the first surface of the space transformer, a first power plane disposed on the first surface of the space transformer and patterned to couple the power line and the ground line to the printed circuit board, and a second power plane disposed on a surface of the printed circuit board and patterned to couple the power line and the ground line of the space transformer to the printed circuit board, wherein the second power plane is in electrical connection with the first power plane.
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Citations
20 Claims
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1. A probe card for wafer level test, comprising:
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a space transformer having a power line, a ground line, and signal lines embedded therein, wherein the space transformer includes a first surface having a first pitch and a second surface having a second pitch substantially less than the first pitch; a printed circuit board configured approximate the first surface of the space transformer; a first power plane disposed on the first surface of the space transformer and patterned to couple the power line and the ground line to the printed circuit board; and a second power plane disposed on a surface of the printed circuit board and patterned to couple the power line and the ground line of the space transformer to the printed circuit board, wherein the second power plane is in electrical connection with the first power plane. - View Dependent Claims (2, 3, 4)
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5. A probe card for wafer level testing, comprising:
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a space transformer having a power line, a ground line, and signal lines embedded therein, wherein the space transformer includes various conductive lines having a first pitch on a first surface and a second pitch on a second surface, the second pitch being substantially less than the first pitch; a printed circuit board configured approximate the first surface of the space transformer; and a plurality of conductive plates disposed on the first surface of the space transformer and patterned to couple the power line and the ground line of the space transformer to the printed circuit board, the conductive plates having a greater contact area than a structure coupling the signal lines of the spacer transformer. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A wafer test system, comprising:
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a probe card designed to test a wafer including; a space transformer having a power line, a ground line, and signal lines embedded therein, wherein the space transformer includes various conductive lines having a first pitch on a first surface and a second pitch on a second surface, the second pitch being substantially less than the first pitch, a printed circuit board configured approximate the first surface of the space transformer, and a first power plane disposed on the first surface of the space transformer and patterned to couple the power line and the ground line to the printed circuit board, the first power plane comprising a conductive plate having a greater contact area than a structure coupling the signal lines of the space transformer to the printed circuit board; a wafer prober designed to hold a wafer to be tested and control the probe card during a wafer test; and a tester coupled to the probe card through a connection cable. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification