SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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Abstract
A semiconductor device capable of high speed operation is provided. Further, a semiconductor device in which change in electric characteristics due to a short channel effect is hardly caused is provided. An oxide semiconductor having crystallinity is used for a semiconductor layer of a transistor. A channel formation region, a source region, and a drain region are formed in the semiconductor layer. The source region and the drain region are formed by self-aligned process in which one or more elements selected from Group 15 elements are added to the semiconductor layer with the use of a gate electrode as a mask. The source region and the drain region can have a wurtzite crystal structure.
11 Citations
20 Claims
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1. (canceled)
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2. A semiconductor device comprising:
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an oxide semiconductor layer including a channel formation region, a source region and a drain region, wherein; the oxide semiconductor layer contains zinc, indium and gallium; the channel formation region includes crystals; the crystals are c-axis-oriented in a direction substantially perpendicular to a surface of the oxide semiconductor layer; the crystals comprise atoms arranged to have a triangular or hexagonal shape in an a-b plane; each of the source region and the drain region includes at least one element selected from Group 15 elements; and the source region and the drain region have a wurtzite crystal structure. - View Dependent Claims (3, 4, 5, 6)
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7. A semiconductor device comprising:
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an oxide semiconductor layer including a channel formation region, a source region and a drain region, wherein; the channel formation region includes crystals; the crystals are c-axis-oriented in a direction substantially perpendicular to a surface of the oxide semiconductor layer; the crystals comprise atoms arranged to have a triangular or hexagonal shape in an a-b plane; an energy gap of the channel formation region is larger than an energy gap of each of the source region and the drain region; and the energy gap of the channel formation region is 2.5 eV or more. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A semiconductor device comprising:
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an oxide semiconductor layer including a channel formation region, a source region and a drain region, wherein; the oxide semiconductor layer contains zinc, indium and gallium; the channel formation region includes crystals; the crystals are c-axis-oriented in a direction substantially perpendicular to a surface of the oxide semiconductor layer; the crystals comprise atoms arranged to have a triangular or hexagonal shape in an a-b plane; each of the source region and the drain region includes at least one element selected from Group 15 elements; the source region and the drain region have a wurtzite crystal structure;
an energy gap of the channel formation region is larger than an energy gap of each of the source region and the drain region; andthe energy gap of the channel formation region is 2.5 eV or more. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification