FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
First Claim
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1. A functional device comprising:
- a movable member that can be displaced along a first axis;
a movable electrode part extended from the movable member;
a fixed electrode part provided to be opposed to the movable electrode part; and
a stopper part that regulates displacement of the movable member,wherein a projecting part projecting along the first axis is provided on the movable member, anda distance between an end of the projecting part and the stopper part is shorter than a distance between the movable electrode part and the fixed electrode part.
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Abstract
A functional device includes a movable member that can be displaced along a first axis, a movable electrode part extended from the movable member, a fixed electrode part provided to be opposed to the movable electrode part, and a stopper part that regulates displacement of the movable member. A projecting part projecting along the first axis is provided on the movable member, and a distance between an end of the projecting part and the stopper part is shorter than a distance between the movable electrode part and the fixed electrode part.
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Citations
14 Claims
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1. A functional device comprising:
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a movable member that can be displaced along a first axis; a movable electrode part extended from the movable member; a fixed electrode part provided to be opposed to the movable electrode part; and a stopper part that regulates displacement of the movable member, wherein a projecting part projecting along the first axis is provided on the movable member, and a distance between an end of the projecting part and the stopper part is shorter than a distance between the movable electrode part and the fixed electrode part. - View Dependent Claims (2, 3, 4, 5, 6, 11, 13)
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7. A functional device comprising:
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a movable member that can be displaced along a first axis; a movable electrode part extended from the movable member; a fixed electrode part provided to be opposed to the movable electrode part; a stopper part that regulates displacement of the movable member; a first fixed part and a second fixed part provided on both sides of the stopper part; a first beam part that connects the first fixed part and the movable member; and a second beam part that connects the second fixed part and the movable member, wherein the stopper part is provided to project toward the movable member, and a distance between the stopper part and the movable member is shorter than a distance between the movable electrode part and the fixed electrode part. - View Dependent Claims (8, 9, 10, 12, 14)
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Specification