GYROSCOPE STRUCTURE AND GYROSCOPE
First Claim
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1. A microelectromechanical gyroscope structure, comprising:
- a first seismic mass including a planar surface;
a second seismic mass including a planar surface;
a first spring structure for suspending the first seismic mass and the second seismic mass on another body element in a parallel position, wherein the planar surface of the first seismic mass and the planar surface of the second seismic mass form a reference plane of masses;
excitation means;
detection means;
whereinthe first spring structure includes a first anchor point within the plane of the first seismic mass for attaching the first seismic mass to the other body element, and a first spring assembly attached to the first anchor point and the first seismic mass, which first spring assembly enables rotary oscillation of the first seismic mass about a first excitation axis that is parallel to the plane of masses;
the first spring structure includes a second anchor point within the plane of the second seismic mass for attaching the second seismic mass to the other body element, and a second spring assembly attached to the second anchor point and the second seismic mass, which second spring assembly enables rotary oscillation of the second seismic mass about a second excitation axis that is parallel to the plane of masses;
the first excitation axis and the second excitation axis are aligned to a common primary axis;
the first spring assembly enables rotary oscillation of the first seismic mass about a first detection axis that is perpendicular to the plane of masses;
the second spring assembly enables rotary oscillation of the second seismic mass about a second detection axis that is perpendicular to the plane of masses;
the first detection axis and the second detection axis are separated by a non-zero distance;
the excitation means are configured to drive the first seismic mass and the second seismic mass to oscillate about the common primary axis;
the detection means include at least one detector element with an in-plane detection comb and a second spring structure for transforming the rotary oscillation of the first seismic mass or of the second seismic mass into linear oscillation of the in-plane detection comb in the plane of masses in a direction parallel to the common primary axis;
the detection means are configured to detect the linear oscillation of the in-plane detection comb.
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Abstract
A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.
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Citations
24 Claims
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1. A microelectromechanical gyroscope structure, comprising:
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a first seismic mass including a planar surface; a second seismic mass including a planar surface; a first spring structure for suspending the first seismic mass and the second seismic mass on another body element in a parallel position, wherein the planar surface of the first seismic mass and the planar surface of the second seismic mass form a reference plane of masses; excitation means; detection means;
whereinthe first spring structure includes a first anchor point within the plane of the first seismic mass for attaching the first seismic mass to the other body element, and a first spring assembly attached to the first anchor point and the first seismic mass, which first spring assembly enables rotary oscillation of the first seismic mass about a first excitation axis that is parallel to the plane of masses; the first spring structure includes a second anchor point within the plane of the second seismic mass for attaching the second seismic mass to the other body element, and a second spring assembly attached to the second anchor point and the second seismic mass, which second spring assembly enables rotary oscillation of the second seismic mass about a second excitation axis that is parallel to the plane of masses; the first excitation axis and the second excitation axis are aligned to a common primary axis; the first spring assembly enables rotary oscillation of the first seismic mass about a first detection axis that is perpendicular to the plane of masses; the second spring assembly enables rotary oscillation of the second seismic mass about a second detection axis that is perpendicular to the plane of masses; the first detection axis and the second detection axis are separated by a non-zero distance; the excitation means are configured to drive the first seismic mass and the second seismic mass to oscillate about the common primary axis; the detection means include at least one detector element with an in-plane detection comb and a second spring structure for transforming the rotary oscillation of the first seismic mass or of the second seismic mass into linear oscillation of the in-plane detection comb in the plane of masses in a direction parallel to the common primary axis; the detection means are configured to detect the linear oscillation of the in-plane detection comb. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification