STRAIN SENSOR AND METHOD FOR MANUFACTURING THE SAME
First Claim
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1. A strain sensor, comprising:
- a substrate having a first surface;
a lid provided on the first surface;
a frame provided between the substrate and the lid, the frame being nonconductive and including a magnetic body; and
a sensing unit provided inside the frame between the substrate and the lid, the sensing unit including a magnetoresistance effect element.
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Abstract
According to one embodiment, a strain sensor includes a substrate, a lid, a frame, and a sensing unit. The substrate has a first surface. The lid is provided on the first surface. The frame is provided between the substrate and the lid. The frame is nonconductive and includes a magnetic body. The sensing unit is provided inside the frame between the substrate and the lid, and includes a magnetoresistance effect element.
5 Citations
20 Claims
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1. A strain sensor, comprising:
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a substrate having a first surface; a lid provided on the first surface; a frame provided between the substrate and the lid, the frame being nonconductive and including a magnetic body; and a sensing unit provided inside the frame between the substrate and the lid, the sensing unit including a magnetoresistance effect element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for manufacturing a strain sensor, comprising:
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preparing a substrate material having a first surface; preparing a sensing unit including a magnetoresistance effect element; mounting the sensing unit on the first surface; coating a paste material onto the first surface around a periphery of the sensing unit, the paste material being nonconductive and including a magnetic body; mounting a lid material on the sensing unit with the paste material interposed; forming a frame by curing the paste material; and cutting the lid material, the frame, and the substrate material in a direction orthogonal to the first surface. - View Dependent Claims (19, 20)
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Specification