×

POGO PIN AND PROBE CARD, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME

  • US 20150070038A1
  • Filed: 08/29/2014
  • Published: 03/12/2015
  • Est. Priority Date: 09/10/2013
  • Status: Active Grant
First Claim
Patent Images

1. A probe card comprising:

  • a printed circuit board (PCB) having a circuit pattern through which a test current passes;

    a probing head arranged under the PCB, the probing head including circuitry through which the test current passes;

    a plurality of needles provided to the probing head to supply the test current to an object; and

    a plurality of pogo pins positioned between the PCB and the probing head, each pogo pin including a housing arranged between the PCB and the probing head, a resilient connecting member arranged in the housing to electrically connect the PCB with the probing head, and a switching unit provided in the housing to selectively cut off an electrical connection between the PCB and the probing head.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×