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OPTIMIZATION OF SOURCE, MASK AND PROJECTION OPTICS

  • US 20150074622A1
  • Filed: 11/17/2014
  • Published: 03/12/2015
  • Est. Priority Date: 11/10/2010
  • Status: Active Grant
First Claim
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1. A computer-implemented method for improving a simulation of a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus comprising data representing an illumination source and projection optics, the method comprising:

  • formulating a multi-variable cost function comprising projection-optics-related design variables that affect characteristics of the lithographic process; and

    reconfiguring, using the computer, the characteristics of the lithographic process by adjusting the projection-optics-related design variables, until a termination condition for the multi-variable cost function is satisfied.

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