OPTIMIZATION OF SOURCE, MASK AND PROJECTION OPTICS
First Claim
1. A computer-implemented method for improving a simulation of a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus comprising data representing an illumination source and projection optics, the method comprising:
- formulating a multi-variable cost function comprising projection-optics-related design variables that affect characteristics of the lithographic process; and
reconfiguring, using the computer, the characteristics of the lithographic process by adjusting the projection-optics-related design variables, until a termination condition for the multi-variable cost function is satisfied.
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Abstract
Embodiments of the present invention provide methods for optimizing a lithographic projection apparatus including optimizing projection optics therein, and preferably including optimizing a source, a mask, and the projection optics. The projection optics is sometimes broadly referred to as “lens”, and therefore the joint optimization process may be termed source mask lens optimization (SMLO). SMLO is desirable over existing source mask optimization process (SMO), partially because including the projection optics in the optimization can lead to a larger process window by introducing a plurality of adjustable characteristics of the projection optics. The projection optics can be used to shape wavefront in the lithographic projection apparatus, enabling aberration control of the overall imaging process. According to the embodiments herein, the optimization can be accelerated by iteratively using linear fitting algorithm or using Taylor series expansion using partial derivatives of transmission cross coefficients (TCCs).
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Citations
23 Claims
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1. A computer-implemented method for improving a simulation of a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus comprising data representing an illumination source and projection optics, the method comprising:
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formulating a multi-variable cost function comprising projection-optics-related design variables that affect characteristics of the lithographic process; and reconfiguring, using the computer, the characteristics of the lithographic process by adjusting the projection-optics-related design variables, until a termination condition for the multi-variable cost function is satisfied. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification