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SENSOR DEVICE

  • US 20150075285A1
  • Filed: 05/13/2013
  • Published: 03/19/2015
  • Est. Priority Date: 05/15/2012
  • Status: Active Grant
First Claim
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1. A sensor device comprising:

  • a semiconductor substrate; and

    a plurality of sensing portions placed on one side of the semiconductor substrate and converting a physical quantity into an electrical signal,wherein the one side of the semiconductor substrate is parallel to a reference plane defined by an X-direction and a Y-direction perpendicular to each other,the semiconductor substrate has a center point that is both a geometric center and a center of mass,the semiconductor substrate is axisymmetric with respect to each of a first reference line that passes through the center point and is parallel to the X-direction and a second reference line that passes through the center point and is parallel to the Y-direction,each of the sensing portions is axisymmetric with respect to each of the first reference line and the second reference line,each of the sensing portions includes a frame portion,the frame portions of the sensing portions have respective sizes different from one another,the sensing portions are arranged in a nested shape such that at least one of the sensing portions is placed inside an area surrounded by the frame portion of another one of the sensing portions,the sensing portions include an outside sensing portion having a largest dimension, andthe frame portion of the outside sensing portion is arranged along an edge portion of the one side of the semiconductor substrate.

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