ACOUSTIC TRANSDUCER AND MICROPHONE
First Claim
1. An acoustic transducer comprising:
- a substrate having a cavity;
a vibrating electrode plate disposed above the substrate and having a void portion that allows pressure to escape;
a fixed electrode plate disposed above the substrate opposite the vibrating electrode plate; and
a leak pressure regulation portion that hinders leakage of air pressure by passing through the void portion when the vibrating electrode plate is not undergoing deformation, and that becomes separated from the void portion and allows pressure to escape by passing through the void portion when the vibrating electrode plate undergoes deformation from being subjected to pressure.
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Accused Products
Abstract
An acoustic transducer has a substrate having a cavity, a vibrating electrode plate disposed above the substrate and having a void portion that allows pressure to escape, a fixed electrode plate disposed above the substrate opposite the vibrating electrode plate, and a leak pressure regulation portion that hinders leakage of air pressure by passing through the void portion when the vibrating electrode plate is not undergoing deformation, and that becomes separated from the void portion and allows pressure to escape by passing through the void portion when the vibrating electrode plate undergoes deformation from being subjected to pressure.
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Citations
23 Claims
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1. An acoustic transducer comprising:
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a substrate having a cavity; a vibrating electrode plate disposed above the substrate and having a void portion that allows pressure to escape; a fixed electrode plate disposed above the substrate opposite the vibrating electrode plate; and a leak pressure regulation portion that hinders leakage of air pressure by passing through the void portion when the vibrating electrode plate is not undergoing deformation, and that becomes separated from the void portion and allows pressure to escape by passing through the void portion when the vibrating electrode plate undergoes deformation from being subjected to pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification