FLUID DEPOSITION APPARTUS AND METHOD
First Claim
1. A micro-fluidic probe card, comprising:
- a probe card body having a first side and a second side;
a sealant element connected to the second side of the probe card body in a manner that forms a cavity within a hollow interior of the sealant element;
a fluid inlet comprising a first conduit extending between the first side and the second side, wherein the fluid inlet is configured to provide a fluid from a processing tool to the cavity; and
a fluid outlet comprising a second conduit extending between the first side and the second side, wherein the fluid outlet is configured to remove the fluid from the cavity.
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Accused Products
Abstract
The present disclosure relates to a micro-fluidic probe card that deposits a fluidic chemical onto a substrate with a minimal amount of fluidic chemical waste, and an associated method of operation. In some embodiments, the micro-fluidic probe card has a probe card body with a first side and a second side. A sealant element, which contacts a substrate, is connected to the second side of the probe card body in a manner that forms a cavity within an interior of the sealant element. A fluid inlet, which provides a fluid from a processing tool to the cavity, is a first conduit extending between the first side and the second side of the probe card body. A fluid outlet, which removes the fluid from the cavity, is a second conduit extending between the first side and the second side of the probe card body.
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Citations
20 Claims
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1. A micro-fluidic probe card, comprising:
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a probe card body having a first side and a second side; a sealant element connected to the second side of the probe card body in a manner that forms a cavity within a hollow interior of the sealant element; a fluid inlet comprising a first conduit extending between the first side and the second side, wherein the fluid inlet is configured to provide a fluid from a processing tool to the cavity; and a fluid outlet comprising a second conduit extending between the first side and the second side, wherein the fluid outlet is configured to remove the fluid from the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A micro-fluidic probe card, comprising:
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a fluid inlet comprising a first conduit extending between a first side of a micro-fluidic probe card and a second side of the micro-fluidic probe card, wherein the fluid inlet is configured to provide a fluidic chemical from a processing tool to an exposure chamber on the second side of the micro-fluidic probe card; a fluid outlet comprising a second conduit extending between the first side and the second side, wherein the fluid outlet is configured to remove the fluidic chemical from the exposure chamber; and a sealant element configured to abut a substrate, wherein the sealant element is connected to the second side of the micro-fluidic probe card at a position that forms sidewalls of the exposure chamber. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A method of depositing a fluid onto a substrate, comprising:
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forming a micro-fluidic probe card having a fluid inlet and a fluid outlet in communication with a exposure chamber; aligning a substrate with the micro-fluidic probe card; mounting the substrate to the micro-fluidic probe card at a position abutting the exposure chamber; selectively introducing a first fluidic chemical to the substrate via the fluid inlet of the micro-fluidic probe card; and dismounting the micro-fluidic probe card from the substrate. - View Dependent Claims (17, 18, 19, 20)
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Specification