SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. A method of manufacturing a semiconductor device comprising the steps of:
- forming a first oxide insulating layer over a gate electrode;
forming an oxide semiconductor layer over the first oxide insulating layer, wherein the oxide semiconductor layer overlaps with the gate electrode;
forming a second oxide insulating layer over the oxide semiconductor layer, the second oxide insulating layer containing a halogen element; and
heating the oxide semiconductor layer to remove hydrogen from the oxide semiconductor layer at least partly after forming the second oxide insulating layer.
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Abstract
An object is to provide a semiconductor device with stable electric characteristics in which an oxide semiconductor is used. An impurity such as hydrogen or moisture (e.g., a hydrogen atom or a compound containing a hydrogen atom such as H2O) is eliminated from an oxide semiconductor layer with use of a halogen element typified by fluorine or chlorine, so that the impurity concentration in the oxide semiconductor layer is reduced. A gate insulating layer and/or an insulating layer provided in contact with the oxide semiconductor layer can be formed to contain a halogen element. In addition, a halogen element may be attached to the oxide semiconductor layer through plasma treatment under an atmosphere of a gas containing a halogen element.
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Citations
22 Claims
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1. A method of manufacturing a semiconductor device comprising the steps of:
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forming a first oxide insulating layer over a gate electrode; forming an oxide semiconductor layer over the first oxide insulating layer, wherein the oxide semiconductor layer overlaps with the gate electrode; forming a second oxide insulating layer over the oxide semiconductor layer, the second oxide insulating layer containing a halogen element; and heating the oxide semiconductor layer to remove hydrogen from the oxide semiconductor layer at least partly after forming the second oxide insulating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing a semiconductor device comprising the steps of:
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forming a first oxide insulating layer over a gate electrode; forming an oxide semiconductor layer over the first oxide insulating layer, wherein the oxide semiconductor layer overlaps with the gate electrode; forming a second oxide insulating layer over the oxide semiconductor layer; forming a silicon nitride layer over the second oxide insulating layer; and heating the oxide semiconductor layer at a temperature of 100°
C. or higher,wherein the second oxide insulating layer contains fluorine. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method of manufacturing a semiconductor device comprising the steps of:
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forming an oxide semiconductor layer over a substrate; forming an oxide insulating layer on the oxide semiconductor layer; adding fluorine to the oxide insulating layer; and performing a heat treatment after the step of adding fluorine at a temperature of 100°
C. or higher. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification