PRESSURE SENSOR AND PRESSURE SENSOR MANUFACTURING METHOD
First Claim
1. A pressure sensor comprising:
- a support unit;
a substrate supported by the support unit, the substrate being deformable; and
a plurality of sensing elements provided on a part of the substrate,the sensing element includinga first magnetic layer in which magnetization changes according to deformation of the substrate,a second magnetic layer in which magnetization is fixed, andan intermediate layer provided between the first magnetic layer and the second magnetic layer, anda direction of the magnetization of the second magnetic layer of a first sensing element among the plurality of sensing elements being different from a direction of the magnetization of the second magnetic layer of a second sensing element among the plurality of sensing elements.
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Accused Products
Abstract
According to one embodiment, a pressure sensor includes: a support unit; a substrate; and a plurality of sensing elements. The substrate is supported by the support unit and deformable. The plurality of sensing elements are provided on a part of the substrate. The sensing element includes a first magnetic layer, a second magnetic layer, and an intermediate layer. Magnetization of the first magnetic layer changes according to deformation of the substrate. Magnetization of the second magnetic layer is fixed. The intermediate layer is provided between the first magnetic layer and the second magnetic layer. A direction of the magnetization of the second magnetic layer of a first sensing element among the plurality of sensing elements is different from a direction of the magnetization of the second magnetic layer of a second sensing element among the plurality of sensing elements.
15 Citations
20 Claims
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1. A pressure sensor comprising:
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a support unit; a substrate supported by the support unit, the substrate being deformable; and a plurality of sensing elements provided on a part of the substrate, the sensing element including a first magnetic layer in which magnetization changes according to deformation of the substrate, a second magnetic layer in which magnetization is fixed, and an intermediate layer provided between the first magnetic layer and the second magnetic layer, and a direction of the magnetization of the second magnetic layer of a first sensing element among the plurality of sensing elements being different from a direction of the magnetization of the second magnetic layer of a second sensing element among the plurality of sensing elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for manufacturing a pressure sensor comprising:
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forming a deformable substrate; forming a plurality of sensing elements on the substrate, which includes forming, on the substrate, a first magnetic layer in which magnetization changes according to deformation of the substrate, forming a second magnetic layer, and forming an intermediate layer between the first magnetic layer and the second magnetic layer; and performing heat treatment of the sensing elements in a state where the substrate is deformed due to an external pressure. - View Dependent Claims (17, 18, 19, 20)
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Specification