STRAIN SENSING ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
First Claim
Patent Images
1. A strain sensing element provided on a deformable substrate, comprising:
- a first magnetic layer;
a second magnetic layer including Fe1-yBy (0<
y≦
0.3), in which magnetization changes according to deformation of the substrate; and
an intermediate layer provided between the first magnetic layer and the second magnetic layer.
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Abstract
According to one embodiment, a strain sensing element provided on a deformable substrate, includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe1-yBy (0<y≦0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.
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Citations
20 Claims
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1. A strain sensing element provided on a deformable substrate, comprising:
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a first magnetic layer; a second magnetic layer including Fe1-yBy (0<
y≦
0.3), in which magnetization changes according to deformation of the substrate; andan intermediate layer provided between the first magnetic layer and the second magnetic layer. - View Dependent Claims (2, 3, 4, 5, 11, 13, 14, 15, 16, 17, 18, 19)
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6. A strain sensing element provided on a deformable substrate, comprising:
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a first magnetic layer; a second magnetic layer including (FeaX1-a)1-yBy (X being Co or Ni, 0.8≦
a<
1, and 0<
y≦
0.3), in which magnetization changes according to deformation of the substrate; andan intermediate layer provided between the first magnetic layer and the second magnetic layer. - View Dependent Claims (7, 8, 9, 10, 12)
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20. A pressure sensor comprising:
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a support unit; a substrate supported by the support unit, the substrate being deformable; and a strain sensing element provided on the substrate, the strain sensing element including a first magnetic layer, a second magnetic layer including Fe1-yBy (0<
y≦
0.3), in which magnetization changes according to deformation of the substrate, andan intermediate layer provided between the first magnetic layer and the second magnetic layer.
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Specification