POWER MOSFET DEVICES INCLUDING EMBEDDED SCHOTTKY DIODES AND METHODS OF FABRICATING THE SAME
First Claim
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1. A semiconductor device, comprising:
- a semiconductor substrate;
an epi-semiconductor layer disposed on the semiconductor substrate;
trenches disposed in the epi-semiconductor layer defining an active region between the trenches;
a groove region disposed in an upper surface of the active region and separating first and second active protrusions of the active region;
a gate structure disposed in each of the trenches;
a front-side conductive pattern in the groove region;
a first conductivity-type drift region, first and second body channel regions, and first and second source regions configured to form a transistor with the gate structure, wherein the first conductivity-type drift region is disposed in the active region of the epi-semiconductor layer, wherein the first and second body channel regions have a second conductivity-type different from the first conductivity-type and are spaced apart from each other, and wherein the first and second source regions have the first conductivity-type and are spaced apart from each other on opposite sides of the groove region; and
a Schottky semiconductor region having the first conductivity-type disposed between the first and second body channel regions in the groove region and in the active region under a bottom surface of the groove region, and configuring a Schottky diode with the front-side conductive pattern.
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Abstract
A semiconductor device can include first and second vertical channel power MOSFET transistors that are arranged in a split-gate configuration in a semiconductor substrate. A groove can be in an active region between the first and second vertical channel power MOSFET transistors and a conductive pattern can be in the groove on the active region, where the conductive pattern can include a source contact for the first and second vertical channel power MOSFET transistors. A vertical Schottky semiconductor region can be embedded in the groove beneath the conductive pattern between the vertical channels.
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Citations
31 Claims
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1. A semiconductor device, comprising:
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a semiconductor substrate; an epi-semiconductor layer disposed on the semiconductor substrate; trenches disposed in the epi-semiconductor layer defining an active region between the trenches; a groove region disposed in an upper surface of the active region and separating first and second active protrusions of the active region; a gate structure disposed in each of the trenches; a front-side conductive pattern in the groove region; a first conductivity-type drift region, first and second body channel regions, and first and second source regions configured to form a transistor with the gate structure, wherein the first conductivity-type drift region is disposed in the active region of the epi-semiconductor layer, wherein the first and second body channel regions have a second conductivity-type different from the first conductivity-type and are spaced apart from each other, and wherein the first and second source regions have the first conductivity-type and are spaced apart from each other on opposite sides of the groove region; and a Schottky semiconductor region having the first conductivity-type disposed between the first and second body channel regions in the groove region and in the active region under a bottom surface of the groove region, and configuring a Schottky diode with the front-side conductive pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8-18. -18. (canceled)
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19. A method of fabricating a semiconductor device, comprising:
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forming a first conductivity-type semiconductor layer on a semiconductor substrate; forming trenches in the semiconductor layer to define an active region between the trenches; forming a shield conductive pattern and a preliminary insulating structure surrounding the shield conductive pattern in each of the trenches, wherein the preliminary insulating structure is located at a lower level than an upper surface of the active region and partially fills the trenches; forming a body impurity region having a second conductivity-type different from the first conductivity-type by performing a body channel ion-implantation process to an upper portion of the active region, forming an insulating structure by partially etching the preliminary insulating structure after forming the body impurity region; forming a gate structure on the insulating structure; forming a first conductivity-type source impurity region in the upper portion of the active region, and a groove region sequentially passing through the source impurity region and the body impurity region after forming the gate structure, wherein the groove region has a tapered sidewall, the source impurity region includes first and second source regions spaced apart from each other on opposite sides of the groove region, and the body impurity region includes first and second body channel regions spaced apart from each other on the opposite sides of the groove region; and forming a front-side conductive pattern filling the groove region. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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26. A semiconductor device, comprising:
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first and second vertical channel power MOSFET transistors arranged in a split-gate configuration in a semiconductor substrate; a groove in an active region between the first and second vertical channel power MOSFET transistors; a conductive pattern in the groove on the active region, the conductive pattern comprising a source contact for the first and second vertical channel power MOSFET transistors; and a vertical Schottky semiconductor region embedded in the groove beneath the conductive pattern between the vertical channel power MOSFET transistors. - View Dependent Claims (27, 28, 29, 30, 31)
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Specification