Compact Fluid Analysis Device and Method to Fabricate
First Claim
1. A device for analyzing a fluid sample, the device comprising:
- a fluidic substrate comprising;
a micro-fluidic component embedded in the fluidic substrate and configured to propagate a fluid sample via capillary force through the micro-fluidic component, anda means for providing a fluid sample connected to the micro-fluidic component; and
a lid attached to the fluidic substrate, at least partly covering the fluidic substrate, and at least partly closing the micro-fluidic component,wherein the fluidic substrate is a silicon fluidic substrate,and wherein the lid is a CMOS chip.
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Abstract
The present disclosure relates to a device for analyzing a fluid sample. In one aspect, the device includes a fluidic substrate that comprises a micro-fluidic component embedded in the fluidic substrate configured to propagate a fluid sample via capillary force through the device and a means for providing a fluid sample connected to the micro-fluidic component. The device also includes a lid attached to the fluidic substrate at least partly covering the fluidic substrate and at least partly closing the micro-fluidic component. The fluidic substrate may be a silicon fluidic substrate and the lid may be a CMOS chip. In another aspect, embodiments of the present disclosure relate to a method for fabricating such a device, and the method may include providing a fluidic substrate, providing a lid, and attaching, through a CMOS compatible bonding process, the fluidic substrate to the lid to close the fluidic substrate at least partly.
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Citations
17 Claims
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1. A device for analyzing a fluid sample, the device comprising:
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a fluidic substrate comprising; a micro-fluidic component embedded in the fluidic substrate and configured to propagate a fluid sample via capillary force through the micro-fluidic component, and a means for providing a fluid sample connected to the micro-fluidic component; and a lid attached to the fluidic substrate, at least partly covering the fluidic substrate, and at least partly closing the micro-fluidic component, wherein the fluidic substrate is a silicon fluidic substrate, and wherein the lid is a CMOS chip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 17)
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14. A method for fabricating a device for analyzing a fluid sample, the method comprising:
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providing a fluidic substrate; providing a lid; and attaching the fluidic substrate to the lid to close the fluidic substrate at least partly, wherein the fluidic substrate is a silicon fluidic substrate and the lid (103) is CMOS chip, and wherein the fluidic substrate is attached to the lid using a CMOS compatible bonding process. - View Dependent Claims (15, 16)
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Specification