MASK ASSEMBLY AND DEPOSITION APPARATUS USING THE SAME FOR FLAT PANEL DISPLAY

• US 20150101536A1
• Filed: 07/30/2014
• Published: 04/16/2015
• Est. Priority Date: 10/11/2013
• Status: Abandoned Application

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: HAN, Jeong Won
• Application Number:
  US14/446,665
• Publication Number:
  US 20150101536A1
• Time in Patent Office: Days
• US Class Current: 118/721
• CPC Class Codes: C23C 14/042 using masks

Abstract

A mask assembly includes a mask frame including an opening and a frame enclosing the opening, a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame, a supporter crossing the opening and coupled to the pattern mask, and a fixing pin coupling the pattern mask and the supporter to each other. At least one of the pattern mask and the supporter has a fixing part including a plurality of holes, and the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “T” shape to fix the pattern mask and the supporter to each other.

Claims

1. A mask assembly comprising:

a mask frame including an opening and a frame enclosing the opening;

a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame;

a supporter crossing the opening and coupled to the pattern mask; and

a fixing pin coupling the pattern mask and the supporter to each other,

wherein at least one of the pattern mask and the supporter has a fixing part including a plurality of holes, and

wherein the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “

T”

shape to fix the pattern mask and the supporter to each other.

2. The mask assembly of claim 1, wherein the pattern includes at least one slit.

3. The mask assembly of claim 2, wherein the pattern mask is made of at least one unit pattern mask.

4. The mask assembly of claim 1, wherein the supporter is formed in plural and are separated from each other.

5. The mask assembly of claim 4, wherein the supporter is disposed in a length direction of the pattern mask.

6. The mask assembly of claim 4, wherein the supporter is disposed in a direction perpendicular to the length direction of the pattern mask.

7. The mask assembly of claim 4, wherein the supporter is disposed in both the direction of the length direction of the pattern mask and the direction perpendicular to the length direction.

8. The mask assembly of claim 1, wherein the frame has a groove configured to receive an end of the supporter therein.

9. The mask assembly of claim 1, wherein at least one of the pattern mask and the supporter has a receiving groove configured to receive the “

T”

shaped end of the fixing pin therein.

10. The mask assembly of claim 1, wherein the fixing pin is formed of a metal or a plastic material.

11. The mask assembly of claim 10, wherein the fixing pin is formed of a material that is etched by an etchant.

12. The mask assembly of claim 1, wherein the fixing pin is coupled to the pattern mask or the supporter.

13. The mask assembly of claim 12, wherein the fixing pin is united with one of the pattern mask or the supporter.

14. A deposition apparatus for a flat panel display comprising:

a chamber;

a deposition source disposed at a lower side of the chamber; and

a mask assembly disposed on the deposition source and configured to support a substrate,

wherein the mask assembly includes a mask frame including an opening and a frame enclosing the opening, a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame, a supporter crossing the opening and coupled to the pattern mask, and a fixing pin coupling the pattern mask and the supporter to each other,

wherein at least one of the pattern mask and the supporter has a fixing part including a plurality of holes, and

wherein the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “

T”

shape to fix the pattern mask and the supporter to each other.

15. The deposition apparatus of claim 14, wherein the pattern mask is made of at least one unit pattern mask.

16. The deposition apparatus of claim 14, wherein the supporter is formed in plural and are separated from each other.

17. The deposition apparatus of claim 14, wherein at least one of the pattern mask and the supporter has a receiving groove configured to receive the “

T”

shaped end of the fixing pin therein.

18. The deposition apparatus of claim 14, wherein the fixing pin is formed of a metal or a plastic material.

19. The deposition apparatus of claim 18, wherein the fixing pin is formed of a material that is etched by an etchant.

20. The deposition apparatus of claim 14, wherein the fixing pin is coupled to or is integrally formed with the pattern mask or the supporter.

21. A mask assembly comprising:

a mask frame including an opening and a frame enclosing the opening;

a plurality of pattern masks including a pattern part in which a plurality of patterns are disposed thereon and a coupling part coupled to the frame;

a plurality of supporters crossing the opening of the mask frame underneath the pattern masks and supporting the pattern masks thereon; and

a plurality of fixing pins coupling the pattern masks and the supporters to each other,

wherein the pattern masks and/or the supporters have a fixing part including a plurality of holes, and

wherein the fixing pins are disposed in a corresponding one of the fixing parts and at least one end of the fixing pins have a “

T”

shape to fix the pattern masks and the supporters to each other, wherein the supporters are fixed to the pattern masks at gaps between the patterns and wherein the supporters have a width which is narrower than a width of the gaps between the patterns of the pattern masks such that the supporters do not shield the patterns of the pattern masks when the supporters and the pattern masks are fixed to each other.

22. The mask assembly of claim 21, wherein the supporters and the frame are formed of a same material as each other having a high rigidity.

23. The mask assembly of claim 21, wherein the frame further comprises a plurality of grooves disposed therein which are configured to receive opposing ends of each of the supporters therein, and wherein a depth of the grooves is substantially the same as a thickness of the supporters.