MASK ASSEMBLY AND DEPOSITION APPARATUS USING THE SAME FOR FLAT PANEL DISPLAY
First Claim
Patent Images
1. A mask assembly comprising:
- a mask frame including an opening and a frame enclosing the opening;
a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame;
a supporter crossing the opening and coupled to the pattern mask; and
a fixing pin coupling the pattern mask and the supporter to each other,wherein at least one of the pattern mask and the supporter has a fixing part including a plurality of holes, andwherein the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “
T”
shape to fix the pattern mask and the supporter to each other.
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Accused Products
Abstract
A mask assembly includes a mask frame including an opening and a frame enclosing the opening, a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame, a supporter crossing the opening and coupled to the pattern mask, and a fixing pin coupling the pattern mask and the supporter to each other. At least one of the pattern mask and the supporter has a fixing part including a plurality of holes, and the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “T” shape to fix the pattern mask and the supporter to each other.
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Citations
23 Claims
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1. A mask assembly comprising:
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a mask frame including an opening and a frame enclosing the opening; a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame; a supporter crossing the opening and coupled to the pattern mask; and a fixing pin coupling the pattern mask and the supporter to each other, wherein at least one of the pattern mask and the supporter has a fixing part including a plurality of holes, and wherein the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “
T”
shape to fix the pattern mask and the supporter to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A deposition apparatus for a flat panel display comprising:
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a chamber; a deposition source disposed at a lower side of the chamber; and a mask assembly disposed on the deposition source and configured to support a substrate, wherein the mask assembly includes a mask frame including an opening and a frame enclosing the opening, a pattern mask including a pattern part in which at least one pattern is disposed thereon and a coupling part coupled to the frame, a supporter crossing the opening and coupled to the pattern mask, and a fixing pin coupling the pattern mask and the supporter to each other, wherein at least one of the pattern mask and the supporter has a fixing part including a plurality of holes, and wherein the fixing pin is disposed in the fixing part and at least one end of the fixing pin has a “
T”
shape to fix the pattern mask and the supporter to each other. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A mask assembly comprising:
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a mask frame including an opening and a frame enclosing the opening; a plurality of pattern masks including a pattern part in which a plurality of patterns are disposed thereon and a coupling part coupled to the frame; a plurality of supporters crossing the opening of the mask frame underneath the pattern masks and supporting the pattern masks thereon; and a plurality of fixing pins coupling the pattern masks and the supporters to each other, wherein the pattern masks and/or the supporters have a fixing part including a plurality of holes, and wherein the fixing pins are disposed in a corresponding one of the fixing parts and at least one end of the fixing pins have a “
T”
shape to fix the pattern masks and the supporters to each other, wherein the supporters are fixed to the pattern masks at gaps between the patterns and wherein the supporters have a width which is narrower than a width of the gaps between the patterns of the pattern masks such that the supporters do not shield the patterns of the pattern masks when the supporters and the pattern masks are fixed to each other. - View Dependent Claims (22, 23)
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Specification