Passivated and Faceted for Fin Field Effect Transistor
First Claim
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1. A fin field effect transistor (FinFET) comprising:
- a substrate;
a fin structure protruding from the substrate, the fin structure comprising one or more semiconductor layers, each of the semiconductor layers having a different lattice constant of a corresponding immediately underlying layer;
an isolation region adjacent opposing sidewalls of the fin structure, the fin structure having an upper portion extending above the isolation region, the upper portion having slanted sidewalls;
a first passivation layer interposed between the fin structure and the isolation region;
a second passivation layer on the upper portion of the fin structure; and
a gate structure overlying the upper portion of the fin structure.
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Abstract
A fin field effect transistor (FinFET), and a method of forming, is provided. The FinFET has a fin having one or more semiconductor layers epitaxially grown on a substrate. A first passivation layer is formed over the fins, and isolation regions are formed between the fins. An upper portion of the fins are reshaped and a second passivation layer is formed over the reshaped portion. Thereafter, a gate structure may be formed over the fins and source/drain regions may be formed.
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Citations
20 Claims
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1. A fin field effect transistor (FinFET) comprising:
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a substrate; a fin structure protruding from the substrate, the fin structure comprising one or more semiconductor layers, each of the semiconductor layers having a different lattice constant of a corresponding immediately underlying layer; an isolation region adjacent opposing sidewalls of the fin structure, the fin structure having an upper portion extending above the isolation region, the upper portion having slanted sidewalls; a first passivation layer interposed between the fin structure and the isolation region; a second passivation layer on the upper portion of the fin structure; and a gate structure overlying the upper portion of the fin structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of forming a fin field effect transistor (FinFET), the method comprising;
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providing a substrate; forming one or more fins extending from the substrate, each of the one or more fins having one or more semiconductor layers overlying the substrate, each of the one or more fins having a lattice constant different than a lattice constant of an underlying layer; forming a first passivation layer over the one or more fins; forming isolation regions along opposing sidewalls of the one or more fins, the one or more fins extending above an uppermost surface of the isolation regions; reshaping exposed portions of the one or more fins; and forming a second passivation layer over the reshaped exposed portions of the one or more fins. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification