MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING AND METHOD OF FABRICATION
First Claim
1. A method of producing a microelectromechanical systems (MEMS) sensor device comprising:
- forming a first structure having a substrate layer, a first sensor, and a second sensor, said first and second sensors being positioned on a first side of said substrate layer, and said second sensor being laterally spaced apart from said first sensor;
coupling a second structure with said first structure such that said first and second sensors are interposed between said substrate layer and said second structure;
forming a first port and a second port in a second side of said substrate layer, said first port extending through said substrate layer to expose a sense element of said first sensor to an external environment, and said second port extending through said substrate layer to temporarily expose said second sensor to said external environment; and
attaching a third structure to said second side of said substrate layer such that said second port is hermetically sealed by said third structure and an external port of said third structure is aligned with said first port.
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Accused Products
Abstract
A device (20) includes sensors (30, 32, 34) that sense different physical stimuli. Fabrication (90) entails forming (92) a device structure (22) to include the sensors and coupling (150) a cap structure (24) with the device structure so that the sensors are interposed between the cap structure and a substrate layer (28) of the device structure. Fabrication (90) further entails forming ports (38, 40) in the substrate layer (28) such that one port (38) exposes a sense element (44) of the sensor (30) to an external environment (72), and another port (40) temporarily exposes the sensor (34) to the external environment. A seal structure (26) is attached to the substrate layer (28) such that one port (40) is hermetically sealed by the seal structure and an external port (46) of the seal structure is aligned with the port (38).
53 Citations
20 Claims
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1. A method of producing a microelectromechanical systems (MEMS) sensor device comprising:
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forming a first structure having a substrate layer, a first sensor, and a second sensor, said first and second sensors being positioned on a first side of said substrate layer, and said second sensor being laterally spaced apart from said first sensor; coupling a second structure with said first structure such that said first and second sensors are interposed between said substrate layer and said second structure; forming a first port and a second port in a second side of said substrate layer, said first port extending through said substrate layer to expose a sense element of said first sensor to an external environment, and said second port extending through said substrate layer to temporarily expose said second sensor to said external environment; and attaching a third structure to said second side of said substrate layer such that said second port is hermetically sealed by said third structure and an external port of said third structure is aligned with said first port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of producing a microelectromechanical systems (MEMS) sensor device comprising:
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forming a first structure having a substrate layer, a first sensor, and a second sensor, said first and second sensors being positioned on a first side of said substrate layer, and said second sensor being laterally spaced apart from said first sensor; forming a conductive via extending through a second structure from a third side to a fourth side of said second structure; coupling said fourth side of said second structure with said first structure such that said first and second sensors are interposed between said substrate layer and said second structure; forming a first port and a second port in a second side of said substrate layer, said first port extending through said substrate layer to expose a sense element of said first sensor to an external environment, and said second port extending through said substrate layer to temporarily expose said second sensor to said external environment; and attaching a third structure to said second side of said substrate layer such that said second port is hermetically sealed by said third structure and an external port of said third structure is aligned with said first port, said attaching operation being performed following said coupling operation. - View Dependent Claims (14, 15, 16, 17)
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18. A microelectromechanical systems (MEMS) sensor device comprising:
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a first structure having a substrate layer, a first sensor, and a second sensor, said first and second sensors being positioned on a first side of said substrate layer, said second sensor being laterally spaced apart from said first sensor, and said first structure further having a first port and a second port formed in a second side of said substrate layer, said first port extending through said substrate layer to expose a sense element of said first sensor to an external environment, and said second port extending through said substrate layer to said second sensor; a second structure coupled with said first structure to produce at least one hermetically sealed cavity between said substrate layer and said second structure in which said first and second sensors are located; and a third structure having an external port extending through said third structure, said third structure being attached to said second side of said substrate layer such that said second port is hermetically sealed by said third structure and said external port is aligned with said first port. - View Dependent Claims (19, 20)
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Specification