METHOD AND APPARATUS FOR SOLID-STATE MICROBATTERY PHOTOLITHOGRAPHIC MANUFACTURE, SINGULATION AND PASSIVATION
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Accused Products
Abstract
A method for producing a thin film lithium battery is provided, comprising applying a cathode current collector, a cathode material, an anode current collector, and an electrolyte layer separating the cathode material from the anode current collector to a substrate, wherein at least one of the layers contains lithiated compounds that is patterned at least in part by a photolithography operation comprising removal of a photoresist material from the layer containing lithiated compounds by a process including a wet chemical treatment. Additionally, a method and apparatus for making lithium batteries by providing a first sheet that includes a substrate having a cathode material, an anode material, and a LiPON barrier/electrolyte layer separating the cathode material from the anode material; and removing a subset of first material to separate a plurality of cells from the first sheet. In some embodiments, the method further includes depositing second material on the sheet to cover the plurality of cells; and removing a subset of second material to separate a plurality of cells from the first sheet.
19 Citations
48 Claims
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1-20. -20. (canceled)
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21. A method comprising:
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providing a first sheet that includes a substrate, a cathode current collector, a cathode material, an anode current collector, and an electrolyte layer separating the cathode material from the anode current collector; and performing one or more material removal operations to remove material through the cathode current collector, cathode material, the anode current collector, and the electrolyte layer separating the cathode material from the anode current collector, and removing a first portion of the substrate but not through a second portion of the substrate so as to leave a first plurality of battery cells that are separated from one another but wherein a plurality of the first plurality of battery cells remains attached to at least a single unseparated part of the first sheet, whereby sufficient amounts of the substrate are removed so that final separation of the cells may be accomplished by upward or downward force on individual cells. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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29-36. -36. (canceled)
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37. A method for producing a thin film lithium battery comprising:
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a) providing a first sheet that includes a substrate; and b) applying a cathode current collector, a cathode material, an anode current collector, and an electrolyte layer separating the cathode material from the anode current collector to the substrate; wherein at least one of the layers contains lithiated compounds; and wherein the configuration of at least one of the layers containing lithiated compounds is patterned at least in part by a photolithography operation comprising etching at least one of the layers containing lithiated compounds by a wet chemical treatment. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification