SEMICONDUCTOR STRUCTURE WITH HIGH ENERGY DOPANT IMPLANTATION
First Claim
1. A semiconductor device, comprising:
- an epitaxial layer grown over a semiconductor substrate, each comprising a first type of dopant;
a structure disposed within the epitaxial layer, the structure comprising;
a plurality of trenches, each of the trenches comprising a gate electrode and a source electrode disposed within a shield oxide matrix; and
a plurality of mesas, each of which isolates a first of the plurality of trenches from a second of the plurality of trenches;
a body region bridging each of the plurality of mesas, wherein the body region is disposed above the epitaxial layer and comprises a second type of dopant;
a region of elevated concentration of the first type of dopant, which is implanted between the epitaxial layer and the body region; and
a source region comprising the first type of dopant and disposed above the body region.
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Accused Products
Abstract
A semiconductor device has an epitaxial layer grown over a substrate, each having a first dopant type. A structure disposed within the epitaxial layer has multiple trenches, each of which has a gate and a source electrode disposed within a shield oxide matrix. Multiple mesas each isolate a pair of the trenches from each other. A body region with a second dopant type is disposed above the epitaxial layer and bridges each of the mesas. A region of elevated concentration of the first dopant type is implanted at a high energy level between the epitaxial layer and the body region, which reduces resistance spreading into a channel of the device. A source region having the first dopant type is disposed above the body region.
32 Citations
23 Claims
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1. A semiconductor device, comprising:
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an epitaxial layer grown over a semiconductor substrate, each comprising a first type of dopant; a structure disposed within the epitaxial layer, the structure comprising; a plurality of trenches, each of the trenches comprising a gate electrode and a source electrode disposed within a shield oxide matrix; and a plurality of mesas, each of which isolates a first of the plurality of trenches from a second of the plurality of trenches; a body region bridging each of the plurality of mesas, wherein the body region is disposed above the epitaxial layer and comprises a second type of dopant; a region of elevated concentration of the first type of dopant, which is implanted between the epitaxial layer and the body region; and a source region comprising the first type of dopant and disposed above the body region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for fabricating a semiconductor device, the method comprising:
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growing an epitaxial layer grown over a semiconductor substrate, each of which comprises a first type of dopant; assembling a structure disposed within the epitaxial layer, the structure comprising; a plurality of trenches, each of the trenches comprising a gate electrode and a source electrode disposed within a oxide matrix; and a plurality of mesas, each of which isolates a first of the plurality of trenches from a second of the plurality of trenches; depositing a body region bridging each of the plurality of mesas, wherein the body region is disposed above the epitaxial layer and comprises a second type of dopant; implanting, between the epitaxial layer and the body region, a region of elevated concentration of the first type of dopant; and implanting a source region, comprising the first type of dopant. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A semiconductor device product, which is formed by a production process comprising:
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growing an epitaxial layer grown over a semiconductor substrate, each of which comprises a first type of dopant; assembling a structure disposed within the epitaxial layer, the structure comprising; a plurality of trenches, each of the trenches comprising a gate electrode and a source electrode disposed within a oxide matrix, which fills a void etched within the epitaxial layer; and a plurality of mesas, each of which isolates a first of the plurality of trenches from a second of the plurality of trenches; implanting a body region bridging each of the plurality of mesas, wherein the body region is disposed above the epitaxial layer and comprises a second type of dopant; implanting, between the epitaxial layer and the body region, a region of elevated concentration of the first type of dopant at a high energy level; implanting a source region, comprising the first type of dopant; and installing a gate, which is self-aligned in relation to the source region and electrically coupled to the gate electrode.
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Specification