Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same
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Abstract
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
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Citations
52 Claims
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1-29. -29. (canceled)
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30. A variable angle mirror comprising:
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(a) a substrate having a cavity; (b) a thin electrically conductive membrane bounding at least part of the cavity; (c) a first source trace electrically connected to the thin electrically conductive membrane; and (d) a first gate trace located within the cavity. - View Dependent Claims (31, 32, 33, 34)
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35. A variable impedance device comprising:
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(a) a substrate having a cavity; (b) a thin electrically conductive membrane bounding at least part of the cavity; (c) a first source trace electrically connected to the thin electrically conductive membrane; (d) a first sensor trace located within the cavity; and (e) a first gate trace operatively connected to the substrate. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42)
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43. An electrical relay comprising:
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(a) a substrate having a cavity; (b) a thin electrically conductive membrane bounding at least part of the cavity; (c) a first source trace electrically connected to the thin electrically conductive membrane; (d) a first drain trace located within the cavity; (e) a second drain trace located within the cavity; and (f) a first gate trace operatively connected to the substrate. - View Dependent Claims (44, 45, 46, 47, 48, 49, 50, 51)
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52-65. -65. (canceled)
Specification