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MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT

  • US 20150114112A1
  • Filed: 10/30/2013
  • Published: 04/30/2015
  • Est. Priority Date: 10/30/2013
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope, comprising:

  • a supporting body;

    a first movable mass configured to oscillate with respect to the supporting body along a first driving axis and configured to rotate about a first sensing axis;

    a second movable mass configured to oscillate with respect to the supporting body along the first driving axis and configured to rotate around a second sensing axis;

    a first sensing electrode and a second sensing electrode associated with the first movable mass and arranged on the supporting body symmetrically with respect to the first sensing axis, the first movable mass being capacitively coupled to the first sensing electrode and to the second sensing electrode;

    a third sensing electrode and a fourth sensing electrode associated with the second movable mass and arranged on the supporting body symmetrically with respect to the second sensing axis, the second movable mass being capacitively coupled to the third sensing electrode and to the fourth sensing electrode.

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