ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
First Claim
Patent Images
1. An angular velocity sensor comprising:
- a fixing unit;
a base portion;
a supporting unit that supports the base portion with respect to the fixing unit;
a vibration unit that is connected to the base portion; and
a detection unit that is connected to the base portion and vibrates by an action of a Coriolis force based on an angular velocity around a detection axis,wherein when a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around the detection axis with respect to the fixing unit in association with deformation of the supporting unit is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], a relation of f1<
f2<
f3 is satisfied.
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Abstract
An angular velocity sensor includes fixing units, a base portion, beam portions that support the base portion with respect to the fixing units, driving vibrating arms connected to the base portion, and detection vibrating arms connected to the base portion. When a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around a detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], the relation of f1<f2<f3 is satisfied.
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18 Claims
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1. An angular velocity sensor comprising:
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a fixing unit; a base portion; a supporting unit that supports the base portion with respect to the fixing unit; a vibration unit that is connected to the base portion; and a detection unit that is connected to the base portion and vibrates by an action of a Coriolis force based on an angular velocity around a detection axis, wherein when a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around the detection axis with respect to the fixing unit in association with deformation of the supporting unit is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], a relation of f1<
f2<
f3 is satisfied. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification