VARIABLE ORIFICE TYPE PRESSURE-CONTROLLED FLOW CONTROLLER
First Claim
1. A variable orifice type pressure-controlled flow controller, comprising:
- a pressure control unit; and
a variable orifice unit including,a direct touch type metal diaphragm valve having a valve seat and a diaphragm,an orifice formed of a ring-shaped clearance between the valve seat of the direct touch type metal diaphragm valve and the diaphragm,an orifice opening degree arithmetic and control unit,a stepping motor operably connected to be driven in response to an orifice control signal from the orifice opening degree arithmetic and control unit,an eccentric cam operably connected to be turned by the stepping motor,a diaphragm presser, anda direct touch type metal diaphragm valve having a valve opening degree arranged to be controlled by the eccentric cam via the diaphragm presser;
wherein the variable orifice type pressure-controlled flow controller is arranged tocompute a flow rate of a fluid distributed through the orifice of the variable orifice unit according to the formula QP1=KP1 (wherein P1 is an orifice upstream side pressure and K is a constant), andswitches a flow control range, andperforms flow control in a predetermined flow control range by changing a set flow rate signal Qs for the flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit.
1 Assignment
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Accused Products
Abstract
In a variable orifice type pressure-controlled flow controller that includes a pressure control unit and a variable orifice unit, computes a flow rate of a fluid distributed through an orifice of the variable orifice unit as QP1=KP1 (P1 is an orifice upstream side pressure and K is a constant), and switches a flow control range and performs flow control in the flow control range by changing a set flow rate signal Qs for a flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit, the variable orifice unit includes the orifice opening degree arithmetic and control unit.
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Citations
10 Claims
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1. A variable orifice type pressure-controlled flow controller, comprising:
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a pressure control unit; and a variable orifice unit including, a direct touch type metal diaphragm valve having a valve seat and a diaphragm, an orifice formed of a ring-shaped clearance between the valve seat of the direct touch type metal diaphragm valve and the diaphragm, an orifice opening degree arithmetic and control unit, a stepping motor operably connected to be driven in response to an orifice control signal from the orifice opening degree arithmetic and control unit, an eccentric cam operably connected to be turned by the stepping motor, a diaphragm presser, and a direct touch type metal diaphragm valve having a valve opening degree arranged to be controlled by the eccentric cam via the diaphragm presser; wherein the variable orifice type pressure-controlled flow controller is arranged to compute a flow rate of a fluid distributed through the orifice of the variable orifice unit according to the formula QP1=KP1 (wherein P1 is an orifice upstream side pressure and K is a constant), and switches a flow control range, and performs flow control in a predetermined flow control range by changing a set flow rate signal Qs for the flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification