Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same
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Abstract
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
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Citations
65 Claims
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1-51. -51. (canceled)
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52. A method of operating a sensor, wherein the method comprises the steps of:
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(a) applying a voltage between a source trace and a gate trace to decrease the distance between a thin electrically conductive membrane and a sensor trace; (b) measuring a change in capacitance between the thin electrically conductive membrane and the sensor trace in response to a force. - View Dependent Claims (53, 54, 55, 56, 57, 58)
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59. A method of harvesting energy, wherein the method comprises the steps of:
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(a) applying a first time-varying voltage between a source trace and a gate trace to move a proof mass that is mechanically connected to a thin electrically conductive membrane; (b) applying a second time-varying voltage between a first sensor trace and the source trace. - View Dependent Claims (60, 61, 62, 63, 64, 65)
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Specification