VIBRATING ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

• US 20150116050A1
• Filed: 10/24/2014
• Published: 04/30/2015
• Est. Priority Date: 10/29/2013
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: NAKAGAWA, Keiji, NISHIZAWA, Ryuta
• Granted Patent: US 9,246,470 B2
• Time in Patent Office: Days
• US Class Current: 331/156
• CPC Class Codes: H03B 5/32 being a piezoelectric resonator selection of piezoelectric material H10N30/00
• CPC Class Codes: H03H 3/0076 for obtaining desired frequency or temperature coefficients
• CPC Class Codes: H03H 9/0542 consisting of a lateral arrangement H03H9/0566 takes precedence
• CPC Class Codes: H03H 9/21 Crystal tuning forks
• CPC Class Codes: H03L 1/028 of generators comprising piezoelectric resonators H03L1/021, H03L1/022 take precedence; oscillation generators with a piezoelectric resonator H03B5/32

Abstract

A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.

Claims

1. A vibrating element having a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode, wherein

in frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [°

C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [°

C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [°

C.], the Ta is lower than the Tb and the Tc, or the Ta is higher than the Tb and the Tc.

2. The vibrating element according to claim 1, wherein

when a resonance frequency in the drive mode is fa, a resonance frequency in the first detection mode is fb, and a resonance frequency in the second detection mode is fc, the fa falls between the fb and the fc.

3. The vibrating element according to claim 1, comprising:

a base portion;

a pair of drive vibrating arms extended from the base portion; and

a pair of detection vibrating arms extended from the base portion in a direction opposite to the pair of drive vibrating arms.

4. A vibrator comprising:

the vibrating element according to claim 1; and

a package in which the vibrating element is accommodated.

5. A vibrator comprising:

the vibrating element according to claim 2; and

a package in which the vibrating element is accommodated.

6. A vibrator comprising:

the vibrating element according to claim 3; and

a package in which the vibrating element is accommodated.

7. An oscillator comprising:

the vibrating element according to claim 1; and

an oscillation circuit electrically connected to the vibrating element.

8. An oscillator comprising:

the vibrating element according to claim 2; and

an oscillation circuit electrically connected to the vibrating element.

9. An oscillator comprising:

the vibrating element according to claim 3; and

an oscillation circuit electrically connected to the vibrating element.

10. An electronic apparatus comprising the vibrating element according to claim 1.

11. An electronic apparatus comprising the vibrating element according to claim 2.

12. An electronic apparatus comprising the vibrating element according to claim 3.

13. A moving object comprising the vibrating element according to claim 1.

14. A moving object comprising the vibrating element according to claim 2.

15. A moving object comprising the vibrating element according to claim 3.