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Thermal Flow Meter

  • US 20150122011A1
  • Filed: 05/15/2013
  • Published: 05/07/2015
  • Est. Priority Date: 06/15/2012
  • Status: Active Grant
First Claim
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1. A thermal flow meter comprising:

  • a bypass passage for flowing a part of a measurement target gas flowing through a main passage; and

    a flow rate detection circuit for measuring a flow rate of the measurement target gas flowing through the main passage by performing heat transfer with the measurement target gas flowing through the bypass passage, whereinthe bypass passage includes an inlet port for flowing the measurement target gas, an outlet port for returning the measurement target gas to the main passage, and an air flow sensing portion which is arranged between the inlet port and the outlet port and measures the flow rate by performing heat transfer between the flow rate detection circuit and the measurement target gas,a second passage is further provided to communicate a bypass passage on the inlet port between the inlet port of the bypass passage and the air flow sensing portion and a bypass passage on the outlet port between the air flow sensing portion in the bypass passage and the outlet port, andthe second passage includes an inlet port which passes through a wall surface forming the bypass passage on the inlet port of the bypass passage and is opened in the bypass passage on the inlet port, and an outlet port which is opened in a rear side of the wall surface forming the bypass passage on the inlet port.

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