Thermal Flow Meter
First Claim
1. A thermal flow meter comprising:
- a bypass passage for flowing a part of a measurement target gas flowing through a main passage; and
a flow rate detection circuit for measuring a flow rate of the measurement target gas flowing through the main passage by performing heat transfer with the measurement target gas flowing through the bypass passage, whereinthe bypass passage includes an inlet port for flowing the measurement target gas, an outlet port for returning the measurement target gas to the main passage, and an air flow sensing portion which is arranged between the inlet port and the outlet port and measures the flow rate by performing heat transfer between the flow rate detection circuit and the measurement target gas,a second passage is further provided to communicate a bypass passage on the inlet port between the inlet port of the bypass passage and the air flow sensing portion and a bypass passage on the outlet port between the air flow sensing portion in the bypass passage and the outlet port, andthe second passage includes an inlet port which passes through a wall surface forming the bypass passage on the inlet port of the bypass passage and is opened in the bypass passage on the inlet port, and an outlet port which is opened in a rear side of the wall surface forming the bypass passage on the inlet port.
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Accused Products
Abstract
Provided is a thermal flow meter through which a measurement with high accuracy and has a discharge function. In a thermal flow meter 300 of the invention, a part of a measurement target gas 30 flowing through the main passage 124 flows into a bypass passage. A drainage passage 3528 is provided in the bypass passage to communicate a bypass passage 4232 on the inlet port (between the inlet port 350 and the measurement surface 430 serving as the air flow sensing portion) and a bypass passage 4234 on the outlet port (between the measurement surface 430 serving as the air flow sensing portion and the outlet port 352). The drainage passage 3528 includes a through hole 3512. The through hole 3512 includes an inlet port 3542 which penetrates a wall surface 4212 forming the bypass passage 4232 on the inlet port and is opened in the bypass passage 4232 on the inlet port, and an outlet port 3544 which is opened in a rear surface 4213 of the wall surface. Water 3552 flowing into the bypass passage is guided to the through hole 3512, and guided to the bypass passage 4234 on the outlet port through the drainage passage 3528, and discharged to the main passage 124. Therefore, an influence of the water flowing into a measuring portion can be reduced, and the measurement accuracy can be improved.
6 Citations
6 Claims
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1. A thermal flow meter comprising:
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a bypass passage for flowing a part of a measurement target gas flowing through a main passage; and a flow rate detection circuit for measuring a flow rate of the measurement target gas flowing through the main passage by performing heat transfer with the measurement target gas flowing through the bypass passage, wherein the bypass passage includes an inlet port for flowing the measurement target gas, an outlet port for returning the measurement target gas to the main passage, and an air flow sensing portion which is arranged between the inlet port and the outlet port and measures the flow rate by performing heat transfer between the flow rate detection circuit and the measurement target gas, a second passage is further provided to communicate a bypass passage on the inlet port between the inlet port of the bypass passage and the air flow sensing portion and a bypass passage on the outlet port between the air flow sensing portion in the bypass passage and the outlet port, and the second passage includes an inlet port which passes through a wall surface forming the bypass passage on the inlet port of the bypass passage and is opened in the bypass passage on the inlet port, and an outlet port which is opened in a rear side of the wall surface forming the bypass passage on the inlet port. - View Dependent Claims (2, 3, 4, 5)
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6. A thermal flow meter comprising:
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a bypass passage for flowing a part of a measurement target gas flowing through a main passage; an air flow sensing portion for measuring a flow rate of the measurement target gas flowing through the main passage by performing heat transfer with the measurement target gas flowing through the bypass passage; and a housing which includes a resin bypass passage for forming the bypass passage and protects the air flow sensing portion, wherein the bypass passage includes an inlet port for flowing the measurement target gas, and an outlet port for returning the measurement target gas to the main passage, the air flow sensing portion is arranged between the inlet port of the bypass passage and the outlet port of the bypass passage and performs heat transfer with the measurement target gas to measure the flow rate, a bypass passage on the inlet port for connecting the inlet port of the bypass passage and the air flow sensing portion is provided in one surface of the bypass passage of the housing, a bypass passage on the outlet port for connecting the air flow sensing portion and the outlet port of the bypass passage is provided in the other surface of the bypass passage of the housing, and a second passage is provided in a wall between the bypass passage on the inlet port and the bypass passage on the outlet port to penetrate the wall.
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Specification