PRESSURE SENSOR
First Claim
1. A pressure sensor, comprisinga first substrate,a cap attached to the first substrate wherein the cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor, andsensing means for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit,wherein the cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port,wherein the first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.
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Accused Products
Abstract
A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.
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Citations
17 Claims
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1. A pressure sensor, comprising
a first substrate, a cap attached to the first substrate wherein the cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor, and sensing means for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit, wherein the cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port, wherein the first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.
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9. A method for manufacturing a pressure sensor, comprising the steps of
providing a first substrate, providing a second substrate, providing a third substrate, manufacturing a cavity in the second substrate, mounting the third substrate to the second substrate thereby covering the cavity in the second substrate to form a deformable membrane for sensing a pressure applied to the deformable membrane, mounting the assembly of the second substrate and the third substrate to a support portion of the first substrate with the deformable membrane facing the first substrate and providing a gap between the deformable membrane and the first substrate, and manufacturing grooves into the first substrate around a contact portion for electrically connecting the pressure sensor to an external device, thereby making the support portion suspend from the contact portion by means of suspension elements.
Specification