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PRESSURE SENSOR

  • US 20150122042A1
  • Filed: 10/23/2014
  • Published: 05/07/2015
  • Est. Priority Date: 11/06/2013
  • Status: Active Grant
First Claim
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1. A pressure sensor, comprisinga first substrate,a cap attached to the first substrate wherein the cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor, andsensing means for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit,wherein the cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port,wherein the first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

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