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WAFER LEVEL PACKAGING TECHNIQUES

  • US 20150123129A1
  • Filed: 11/05/2013
  • Published: 05/07/2015
  • Est. Priority Date: 11/05/2013
  • Status: Active Grant
First Claim
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1. A packaged integrated circuit (IC) structure comprising:

  • a first substrate comprising a CMOS device and a CMOS bond ring,a second substrate comprising a MEMS device and a MEMS bond ring, the MEMS bond ring surrounding a periphery of the MEMS device and being bonded to the CMOS bond ring, anda protection layer covering outer sidewalls of the MEMS bond ring and outer sidewalls of the CMOS bond ring, and further covering an outer sidewall of the first substrate and does not cover an outer sidewall of the second substrate.

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