ILLUMINATION OPTICAL SYSTEM AND MICROSCOPE
First Claim
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1. An illumination optical system configured to illuminate a sample placed on an object plane with light, the illumination optical system comprising:
- multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system,wherein, among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances.
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Abstract
The illumination optical system is configured to illuminate a sample placed on an object plane with light. The illumination optical system includes multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system. Among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances.
48 Citations
20 Claims
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1. An illumination optical system configured to illuminate a sample placed on an object plane with light, the illumination optical system comprising:
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multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system, wherein, among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances. - View Dependent Claims (2, 3)
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4. A microscope comprising:
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an illumination optical system configured to illuminate a sample placed on an object plane with light; and a projection optical system configured to form an image of the sample, wherein the illumination optical system comprising; an optical element configured to form multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system, wherein, among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification