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ILLUMINATION OPTICAL SYSTEM AND MICROSCOPE

  • US 20150124073A1
  • Filed: 08/29/2013
  • Published: 05/07/2015
  • Est. Priority Date: 08/29/2012
  • Status: Abandoned Application
First Claim
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1. An illumination optical system configured to illuminate a sample placed on an object plane with light, the illumination optical system comprising:

  • multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system,wherein, among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances.

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