×

IMAGE ANALYSIS USEFUL FOR PATTERNED OBJECTS

  • US 20150125053A1
  • Filed: 10/31/2014
  • Published: 05/07/2015
  • Est. Priority Date: 11/01/2013
  • Status: Active Grant
First Claim
Patent Images

1. A method of determining the locations of features in a repeating pattern, comprising(a) providing an object having a repeating pattern of features in an xy plane and a fiducial, wherein the features comprise an area of 100 μ

  • m2 or less and a pitch of 5 μ

    m or less;

    (b) obtaining a target image of the object using a detection apparatus, wherein the target image comprises the repeating pattern of features and the fiducial;

    (c) providing data from the target image to a computer, wherein the computer comprises reference data, wherein the reference data indicates xy coordinates for a virtual fiducial, and(d) performing an algorithm on the computer to determine locations for the features in the target image based on comparison of the virtual fiducial in the reference data to the fiducial in the data from the target image, wherein the locations of the features are determined at a variance of less than 5 μ

    m.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×