IMAGE ANALYSIS USEFUL FOR PATTERNED OBJECTS
First Claim
1. A method of determining the locations of features in a repeating pattern, comprising(a) providing an object having a repeating pattern of features in an xy plane and a fiducial, wherein the features comprise an area of 100 μ
- m2 or less and a pitch of 5 μ
m or less;
(b) obtaining a target image of the object using a detection apparatus, wherein the target image comprises the repeating pattern of features and the fiducial;
(c) providing data from the target image to a computer, wherein the computer comprises reference data, wherein the reference data indicates xy coordinates for a virtual fiducial, and(d) performing an algorithm on the computer to determine locations for the features in the target image based on comparison of the virtual fiducial in the reference data to the fiducial in the data from the target image, wherein the locations of the features are determined at a variance of less than 5 μ
m.
1 Assignment
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Accused Products
Abstract
A method of registering features in a repeating pattern can include (a) providing an object having a repeating pattern of features and a fiducial; (b) obtaining a target image of the object, wherein the target image includes the repeating pattern of features and the fiducial; (c) comparing the fiducial in the target image to reference data, wherein the reference data includes xy coordinates for a virtual fiducial; and (d) determining locations for the features in the target image based on the comparison of the virtual fiducial in the reference data to the fiducial in the data from the target image. The fiducial can have at least concentric circles that produce three different signal levels. The locations of the features can be determined at a variance of less than 5 μm.
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Citations
40 Claims
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1. A method of determining the locations of features in a repeating pattern, comprising
(a) providing an object having a repeating pattern of features in an xy plane and a fiducial, wherein the features comprise an area of 100 μ - m2 or less and a pitch of 5 μ
m or less;(b) obtaining a target image of the object using a detection apparatus, wherein the target image comprises the repeating pattern of features and the fiducial; (c) providing data from the target image to a computer, wherein the computer comprises reference data, wherein the reference data indicates xy coordinates for a virtual fiducial, and (d) performing an algorithm on the computer to determine locations for the features in the target image based on comparison of the virtual fiducial in the reference data to the fiducial in the data from the target image, wherein the locations of the features are determined at a variance of less than 5 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
- m2 or less and a pitch of 5 μ
Specification