CHAMBER CLEANING WHEN USING ACID CHEMISTRIES TO FABRICATE MICROELECTRONIC DEVICES AND PRECURSORS THEREOF
First Claim
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1. A method of cleaning a chamber;
- comprising the steps of;
(a) positioning a microelectronic device precursor in a treatment chamber comprising an interior chamber surface that overlies the precursor;
(b) treating the workpiece with an a, acidic composition under conditions such that an acid residue collects on at least a portion of the interior chamber surface overlying the workpiece;
(c) causing a neutralizing composition comprising at least one base to contact acid residue on the interior chamber surface; and
(d) after the neutralizing composition contacts the acid residue, rinsing the interior chamber surface.
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Abstract
The present invention provides treatment strategies that reduce contamination on wafer surfaces that are treated with acid chemistries. The strategies are suitable for use with a wide variety of wafers, including those including sensitive microelectronic features or precursors thereof. These strategies involve a combination of neutralizing and rinsing strategies that quickly and effectively remove residual acid and acid by-products from both the front side of workpiece(s) as well as from other processing chamber surfaces that can be causes of contamination.
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Citations
26 Claims
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1. A method of cleaning a chamber;
- comprising the steps of;
(a) positioning a microelectronic device precursor in a treatment chamber comprising an interior chamber surface that overlies the precursor; (b) treating the workpiece with an a, acidic composition under conditions such that an acid residue collects on at least a portion of the interior chamber surface overlying the workpiece; (c) causing a neutralizing composition comprising at least one base to contact acid residue on the interior chamber surface; and (d) after the neutralizing composition contacts the acid residue, rinsing the interior chamber surface. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
- comprising the steps of;
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2. A method of processing a microelectronic device precursor, comprising the steps of:
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(a) positioning a microelectronic device precursor in a treatment chamber comprising an interior chamber surface that overlies the precursor; (b) treating the workpiece with an acidic composition under conditions such that a portion of the acidic composition collects on at least a portion of the interior chamber surface; (c) after treating the workpiece with the acidic composition, optionally rinsing the microelectronic precursor with a rinsing liquid without rinsing the interior chamber surface with a rinsing liquid; (d) prior to rinsing the interior chamber surface with a rinsing liquid, treating the workpiece with a second treatment composition comprising a base in a manner such that a portion of the second treatment composition contacts at least a portion of the acid residue on the interior chamber surface and wherein the contact forms a reaction product on the interior surface comprising a salt; (e) after a portion of the second treatment composition contacts at least a portion of the acid residue on the interior chamber surface, rinsing the interior surface with a rinsing liquid.
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24. A method of cleaning a chamber;
- comprising the steps of;
(a) positioning a microelectronic device precursor in a treatment chamber comprising an interior chamber surface that overlies the precursor; (b) treating the workpiece with an a, acidic composition under conditions such that an acid residue is on at least a portion of the interior chamber surface overlying the workpiece; (c) causing a composition comprising aqueous ammonia to contact acid residue on the interior chamber surface; and (d) after the composition contacts the acid residue, rinsing the interior chamber surface. - View Dependent Claims (25)
- comprising the steps of;
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26. A method of cleaning a chamber;
- comprising the steps of;
(a) positioning a microelectronic device precursor in a treatment chamber comprising an interior chamber surface that overlies the precursor; (b) treating the workpiece with an acidic composition under conditions such that an acid residue collects on at least a portion of the interior chamber surface; (c) rinsing the interior chamber surface with an aqueous liquid composition comprising aqueous ammonia; and (d) after rinsing the interior chamber surface, rinsing the workpiece.
- comprising the steps of;
Specification