SHOWERHEAD AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

• US 20150129132A1
• Filed: 07/24/2014
• Published: 05/14/2015
• Est. Priority Date: 11/13/2013
• Status: Abandoned Application

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: LIM, Hong-Taek, KIM, Ki-Kone, KIM, Ho-Jun, BAE, Jong-Yong, KIM, Do-Hyung, WON, Jai-Hyung, LEE, Seung-Moo
• Application Number:
  US14/339,650
• Publication Number:
  US 20150129132A1
• Time in Patent Office: Days
• US Class Current: 156/345.34
• CPC Class Codes: C23C 16/45565 Shower nozzles

Abstract

A showerhead includes a body configured to receive a reaction gas, a nozzle on the body configured to inject the reaction gas to a substrate, and a plurality of conducting members in thermal contact with the body to conduct heat generated from the substrate.

Claims

1. A showerhead, comprising:

a body configured to receive a reaction gas;

a nozzle on the body configured to inject the reaction gas to a substrate; and

a plurality of conducting members in thermal contact with the body to conduct heat generated from the substrate.

2. The showerhead as claimed in claim 1, wherein a concentration of conducting members on a portion of the body on which the heat is concentrated is higher than on other portions of the body.

3. The showerhead as claimed in claim 1, wherein the conducting members are arranged on an entire surface of the body.

4. The showerhead as claimed in claim 3, wherein the conducting members are spaced apart from each other by a substantially same interval.

5. The showerhead as claimed in claim 1, wherein a concentration of conducting members on a central portion of the body is higher than on other portions of the body.

6. The showerhead as claimed in claim 5, wherein the conducting members are spaced apart from each other by a substantially same interval.

7. The showerhead as claimed in claim 1, wherein a concentration of conducting members on an edge portion of the body is higher than on other portions of the body.

8. The showerhead as claimed in claim 7, wherein the conducting members are spaced apart from each other by a substantially same interval.

9. The showerhead as claimed in claim 1, wherein the conducting members include:

first conductors arranged on a central portion of the body; and

second conductors arranged on an edge portion of the body.

10. The showerhead as claimed in claim 9, wherein, within the central portion, the first conductors are spaced apart from each other by a substantially same interval, and, within the edge portion, the second conductors are spaced apart from each other by the substantially same interval.

11. The showerhead as claimed in claim 1, wherein each of the conducting members has an injecting hole to inject the reaction gas to the substrate.

12. The showerhead as claimed in claim 1, wherein each of the conducting members has a cylindrical shape.

13. An apparatus for processing a substrate, the apparatus comprising:

a reaction chamber configured to receive the substrate;

a heater positioned on a bottom surface of the reaction chamber to heat the substrate; and

a showerhead including;

a body configured to receive a reaction gas,

a nozzle on the body configured to inject the reaction gas to the substrate, and

a plurality of conducting members in thermal contact with the body to conduct heat generated from the substrate.

14. The apparatus as claimed in claim 13, further comprising an end plate on a lower surface of the showerhead and thermally contacting the conducting members.

15. The apparatus as claimed in claim 14, further comprising a base plate on an upper surface of the showerhead and thermally contacting the conducting members.

16. A showerhead, comprising:

a body configured to receive a reaction gas;

a nozzle on the body configured to inject the reaction gas to a substrate; and

a plurality of conducting members in thermal contact with the body to conduct heat generated from the substrate, the plurality of conducting members defining upper and lower surfaces of the showerhead.

17. The showerhead as claimed in claim 16, wherein upper and lower surfaces of the conducting members are level with corresponding upper and lower surfaces of edges of the body.

18. The showerhead as claimed in claim 17, wherein the body includes a flat plate and a flange protruding along a perimeter of the flat plate to define the upper and lower surfaces of the edges of the body, the upper and lower surfaces of the conducting members extending from the flat plate to be level with upper and lower surfaces of the flange, respectively.

19. The showerhead as claimed in claim 18, wherein the conducting members are on an entire surface of the flat plate at equal distances from each other.

20. The showerhead as claimed in claim 18, wherein the conducting members are only on a predetermined portion of a surface of the flat plate at equal distances from each other, the predetermined portion corresponding to an area with increased generated heat.