METHOD FOR FORMING A FINFET STRUCTURE
First Claim
1. A method for forming a FinFET structure, at least comprising the following steps:
- providing a substrate, a first region and a second region being defined on the substrate, a first fin structure and a second fin structure being disposed on the substrate within the first region and the second region respectively, a first oxide layer covering the first fin structure and the second fin structure;
forming a first protective layer and a second protective layer entirely on the substrate and the first oxide layer in sequence;
removing the second protective layer within the first region;
removing the first protective layer within the first region;
removing the first oxide layer covering the first fin structure and the second protective layer within the second region;
removing the first protective layer within the second region after the second protective layer within the second region is removed; and
forming a second oxide layer covering the first fin structure, wherein the second oxide layer is formed before the first protective layer within the second region is removed.
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Abstract
A method for forming a FinFET structure includes providing a substrate, a first region and a second region being defined on the substrate, a first fin structure and a second fin structure being disposed on the substrate within the first region and the second region respectively. A first oxide layer cover the first fin structure and the second fin structure. Next a first protective layer and a second protective layer are entirely formed on the substrate and the first oxide layer in sequence, the second protective layer within the first region is removed, and the first protective layer within the first region is then removed. Afterwards, the first oxide layer covering the first fin structure and the second protective layer within the second region are removed simultaneously, and a second oxide layer is formed to cover the first fin structure.
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Citations
8 Claims
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1. A method for forming a FinFET structure, at least comprising the following steps:
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providing a substrate, a first region and a second region being defined on the substrate, a first fin structure and a second fin structure being disposed on the substrate within the first region and the second region respectively, a first oxide layer covering the first fin structure and the second fin structure; forming a first protective layer and a second protective layer entirely on the substrate and the first oxide layer in sequence; removing the second protective layer within the first region; removing the first protective layer within the first region; removing the first oxide layer covering the first fin structure and the second protective layer within the second region; removing the first protective layer within the second region after the second protective layer within the second region is removed; and forming a second oxide layer covering the first fin structure, wherein the second oxide layer is formed before the first protective layer within the second region is removed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification