Pressing Force Sensor

• US 20150135857A1
• Filed: 01/23/2015
• Published: 05/21/2015
• Est. Priority Date: 07/26/2012
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Kawamura, Hideki, Ando, Masamichi
• Granted Patent: US 9,528,890 B2
• Time in Patent Office: Days
• US Class Current: 73/862.045
• CPC Class Codes: G01L 1/22 using resistance strain gauges
• CPC Class Codes: G01L 1/225 Measuring circuits therefor

Abstract

A pressing force sensor that includes an expandable and contractible film, pressing force detecting resistor membranes formed on a portion of a main surface of the film, and a support disposed along the main surface of the film. The support is provided with recesses or holes with openings located in areas where the pressing force detecting resistor membranes on the main surface of the film are located. In the pressing force sensor, when a pressing force is exerted on the main surface of the film, the film is expanded with a pressing force detecting resistor membrane. As a result, the pressing force detecting resistor membrane is deformed, and a change in resistance value of the pressing force detecting resistor membrane corresponding to the deformation is detected.

Claims

1. A pressing force sensor comprising:

an expandable and contractible film;

a pressing force detecting resistor membrane on a portion of a first surface of the expandable and contractible film; and

a support adjacent the expandable and contractible film, the support having a recess adjacent the portion of the expandable and contractible film where the pressing force detecting resistor membrane is located, wherein

a change in resistance value of the pressing force detecting resistor membrane caused by a pressing force exerted on the first surface of the expandable and contractible film that deforms the pressing force detecting resistor membrane is detected.

2. The pressing force sensor according to claim 1, wherein the pressing force detecting resistor membrane includes a first resistor membrane and a second resistor membrane forming a part of a first bridge circuit, and the pressing force is detected by detecting a change in resistance value of the first resistor membrane and/or the second resistor membrane.

3. The pressing force sensor according to claim 2, wherein the pressing force detecting resistor membrane further includes a third resistor membrane and a fourth resistor membrane forming a part of a second bridge circuit, and the pressing force is detected by detecting a change in resistance value of the third resistor membrane and/or the fourth resistor membrane.

4. The pressing force sensor according to claim 2, wherein the first resistor membrane and the second resistor membrane each have a meandering shape.

5. The pressing force sensor according to claim 4, wherein the meandering shape of the first resistor membrane and the second resistor membrane are oriented in a same direction.

6. The pressing force sensor according to claim 3, wherein the first resistor membrane and the second resistor membrane each have a first meandering shape.

7. The pressing force sensor according to claim 6, wherein the third resistor membrane and the fourth resistor membrane each have a second meandering shape.

8. The pressing force sensor according to claim 7, wherein the first meandering shape of the first resistor membrane and the second resistor membrane are oriented in a same direction, and wherein the second meandering shape of the third resistor membrane and the fourth resistor membrane are oriented in a same direction.

9. The pressing force sensor according to claim 1, further comprising a protective film on the first surface of the expandable and contractible film, and wherein the support is adjacent a second surface of the expandable and contractible film, the second surface being opposite the first surface.

10. The pressing force sensor according to claim 1, wherein the support is adjacent the first surface of the expandable and contractible film.

11. The pressing force sensor according to claim 1, further comprising a pressing operation member adjacent the expandable and contractible film and opposite to the support, the pressing operation member configured to transmit a pressing operation to the first surface of the expandable and contractible film.

12. The pressing force sensor according to claim 1, further comprising a piezoelectric film adjacent the expandable and contractible film.

13. The pressing force sensor according to claim 12, wherein the piezoelectric film is between the expandable and contractible film and the support.

14. The pressing force sensor according to claim 12, further comprising a resin film adjacent the piezoelectric film.

15. The pressing force sensor according to claim 12, further comprising an electrode on the piezoelectric film, the electrode being opposed to the pressing force detecting resistor membrane.

16. The pressing force sensor according to claim 14, further comprising:

a first electrode on the piezoelectric film, the first electrode being opposed to the pressing force detecting resistor membrane; and

a second electrode on the resin film, the second electrode being opposed to the first electrode.