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MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

  • US 20150137276A1
  • Filed: 11/19/2013
  • Published: 05/21/2015
  • Est. Priority Date: 11/19/2013
  • Status: Active Grant
First Claim
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1. A micro-electro mechanical system (MEMS) device, comprising:

  • a CMOS substrate;

    a cap substrate;

    a MEMS substrate bonded between the CMOS substrate and the cap substrate, wherein the MEMS substrate comprises at least one first movable element and at least one second movable element;

    a first closed chamber between the MEMS substrate and the cap substrate, wherein the first movable element is in the first closed chamber; and

    a second closed chamber between the MEMS substrate and the cap substrate, wherein the second movable element is in the second closed chamber, and a first pressure of the first closed chamber is higher than a second pressure of the second closed chamber.

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