×

CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FORCES APPLIED BY ELECTROSTATIC CHUCKS, AND RELATED METHODS

  • US 20150138687A1
  • Filed: 01/17/2014
  • Published: 05/21/2015
  • Est. Priority Date: 11/19/2013
  • Status: Active Grant
First Claim
Patent Images

1. A control system, comprising:

  • an electrostatic chuck;

    a sensor positioned to determine a deflection of a workpiece into at least one recess of the electrostatic chuck as the electrostatic chuck applies a clamping force to the workpiece; and

    a controller programmed to determine from the deflection the clamping force applied to the workpiece by the electrostatic chuck, and to adjust a clamping voltage at the electrostatic chuck so that the clamping force reaches and maintains a target clamping force.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×