LEAKAGE DETECTION DEVICE AND FLUID CONTROLLER INCLUDING SAME

• US 20150143876A1
• Filed: 07/11/2013
• Published: 05/28/2015
• Est. Priority Date: 07/23/2012
• Status: Active Grant

• Current Assignee: Fujikin Incorporated
• Original Assignee: Fujikin Incorporated
• Inventors: Dohi, Ryousuke, Shinohara, Tsutomu, Nishino, Kouji, Ikeda, Nobukazu, Yamaji, Michio, Doh, Toshio
• Granted Patent: US 9,702,781 B2
• Time in Patent Office: Days
• US Class Current: 73/40.5A
• CPC Class Codes: G01M 3/24 using infrasonic, sonic, or ultrasonic vibrations
• CPC Class Codes: G01M 3/243 for pipes

Abstract

There is provided a leakage detection device which can be reduced in size and attached to a leakage detection target member, such as a fluid controller, all the time, and thus, can monitor leakage of fluid all the time, and a fluid controller having the same. A fluid controller is configured by a fluid controller main body and a leakage detection device which is attached to the fluid controller main body. In the fluid controller main body, a leakage port for detecting the leakage is provided. The leakage detection device includes a sensor holding body which is attached to the fluid controller main body; an ultrasonic sensor which is held by the sensor holding body to face the leakage port; an ultrasonic passage provided between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit for processing an ultrasonic wave obtained by the ultrasonic sensor.

Claims

1. A leakage detection device which detects leakage of fluid, the device comprising:

a sensor holding body;

an ultrasonic sensor which is held by the sensor holding body to face a leakage port that is provided in a leakage detection target member and causes a sealing part in the leakage detection target member and the outside to communicate with each other;

an ultrasonic passage which is provided between a sensor surface of the ultrasonic sensor and the leakage port; and

a processing circuit which processes an ultrasonic wave obtained by the ultrasonic sensor.

2. A fluid controller, comprising:

a fluid controller main body which controls the flow of fluid; and

a leakage detection device which detects leakage of the fluid in the fluid controller main body,

wherein, in the fluid controller main body, a leakage port which causes a sealing part in the fluid controller main body and the outside to communicate with each other, is provided, and

wherein the leakage detection device is the leakage detention device according to claim 1.